Growth of single crystalline germanium thin film on (100) silicon substrate

Sung Wook Kim, Jaejun Lee, Youn Ho Park, Jeong Min Park, Sangwon Park, Yeon Joo Kim, Heon Jin Choi

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1 Citation (Scopus)


Epitaxial growth of germanium thin films (GeTFs) on Si (111) and Si (100) substrates was investigated, and the prepared films were compared with the films grown on SiO2 substrates. Ge films were prepared in three steps. Initially, a Ge interlayer film with thickness of ∼ 10 nm was deposited on the substrate followed by annealing and recrystallization of the film. A Ge film with a thickness of 500 nm was then deposited. A single crystalline Ge film was grown on Si (100) whereas polycrystalline films were grown on the other substrates. The growth rate of the films depends on the type of the substrates used, which in turn determines the crystallinity of the films. Highly crystalline films were obtained with slow growth rates. The single crystalline epitaxial layer of GeTFs formed on Si (100) exhibited a lower threading dislocation density as compared with those grown on Si (111) and SiO2. [Figure not available: see fulltext.]

Original languageEnglish
Pages (from-to)147-151
Number of pages5
JournalElectronic Materials Letters
Issue number2
Publication statusPublished - 2017 Mar 1

Bibliographical note

Publisher Copyright:
© 2017, The Korean Institute of Metals and Materials and Springer Science+Business Media Dordrecht.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials


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