Growth of transparent nc-InGaO3 (ZnO)2 thin films with indium mol ratios using solution process

Kyung Ho Kim, Gun Hee Kim, Hyun Soo Shin, Byung Du Ahn, Sungho Kang, Hyun Jae Kim

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The effect of indium mol ratio on nanocrystalline (nc)- InGa O3 (ZnO)2 thin films prepared by solution was investigated with structural properties. The size of nanocrystallines tended to increase up to 120 nm with an optimized indium mol ratio after second postannealing at 700°C for 10 s with three cycles. The shape of the nanocrystallines and their growth were determined by the indium mol ratio. The main (008) growth direction, which had a columnar structure, could be retarded by a high indium mol ratio, which could generate the (100) direction growth. After postannealing, the films had with less oxygen deficiency and main stoichometric oxygen bound with metal (In, Ga, and Zn). The growth of nanocrystallines during the second postannealing from small grains with random orientation to large grains with well-aligned orientation could be explained by a self-solid phase reaction with decomposition and combination of precursor without any additional epitaxial layer. It implied that the crystallinity of nc-InGa O3 (ZnO)2 thin films was strongly dependent on process parameters such as temperature and component mol ratio.

Original languageEnglish
Pages (from-to)H848-H851
JournalJournal of the Electrochemical Society
Volume155
Issue number11
DOIs
Publication statusPublished - 2008 Oct 1

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Indium
indium
Thin films
thin films
Oxygen
hypoxia
Epitaxial layers
solid phases
Structural properties
crystallinity
Metals
Decomposition
decomposition
cycles
oxygen
metals
Temperature
temperature
Direction compound

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

Cite this

Kim, Kyung Ho ; Kim, Gun Hee ; Shin, Hyun Soo ; Ahn, Byung Du ; Kang, Sungho ; Kim, Hyun Jae. / Growth of transparent nc-InGaO3 (ZnO)2 thin films with indium mol ratios using solution process. In: Journal of the Electrochemical Society. 2008 ; Vol. 155, No. 11. pp. H848-H851.
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Growth of transparent nc-InGaO3 (ZnO)2 thin films with indium mol ratios using solution process. / Kim, Kyung Ho; Kim, Gun Hee; Shin, Hyun Soo; Ahn, Byung Du; Kang, Sungho; Kim, Hyun Jae.

In: Journal of the Electrochemical Society, Vol. 155, No. 11, 01.10.2008, p. H848-H851.

Research output: Contribution to journalArticle

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