Hermetically sealed inductor-capacitor (LC) resonator for remote pressure monitoring

Eun Chul Park, Jun Bo Yoon, Euisik Yoon

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33 Citations (Scopus)

Abstract

This paper reports an integrated inductor-capacitor (LC) resonator structure fabricated using bulk micromachining and anodic bonding technologies. In this resonator structure, pressure change monitored by a capacitive pressure sensor results in the change of resonance frequency. The resonance frequency shift is detected by inductive coupling from an external transmission coil; therefore, pressure can be monitored remotely using the passive LC resonator. The fabricated device size measures 3 mm × 3 mm × 0.6 mm, and pressure responsivity has been estimated to be 2 MHz/mmHg. This micromachined, hermetically sealed structure is suitable for biomedical applications such as intraocular, cardiovascular and brain pressure monitoring.

Original languageEnglish
Pages (from-to)7124-7128
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number12 B
Publication statusPublished - 1998 Dec 1

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All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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