Abstract
We report the synthesis and characterization of novel block copolymer (BCP) materials for the directed self-assembly (DSA) nanolithography applications. Specifically, the poly(t-butyl acrylate) (PtBA) block in the styrenic block copolymers have been chemically modified to a fluorinated block for the enhancement of the BCP χ-parameters. dPSb- PtBA had been first synthesized by anionic polymerization to prepare a well-defined BCP precursor with narrow polydispersity for the fluorination of PtBA block. Then, the precursor BCP was chemically modified by transalcoholysis of the PtBA-block with 2,2,2-trifluoroethanol. This strategy offers the advantage of flexibility and controllability to tailor the χ-parameter, while maintaining the narrow molecular weight distribution of the BCP materials for the advanced lithography applications. The transmission electron microscopy/small angle x-ray scattering (TEM/SAXS) characterization results of the modified BCP consisting of poly(fluoroalkylate) and PS supported the development of highly ordered lamellar domains in bulk.
Original language | English |
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Title of host publication | Advances in Patterning Materials and Processes XXXIII |
Editors | Todd R. Younkin, Christoph K. Hohle |
Publisher | SPIE |
ISBN (Electronic) | 9781510600140 |
DOIs | |
Publication status | Published - 2016 |
Event | Advances in Patterning Materials and Processes XXXIII - San Jose, United States Duration: 2016 Feb 22 → 2016 Feb 25 |
Publication series
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Volume | 9779 |
ISSN (Print) | 0277-786X |
ISSN (Electronic) | 1996-756X |
Other
Other | Advances in Patterning Materials and Processes XXXIII |
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Country/Territory | United States |
City | San Jose |
Period | 16/2/22 → 16/2/25 |
Bibliographical note
Publisher Copyright:© 2016 SPIE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering