High performance core-shell nanowire array devices prepared by atomic layer deposition

Hyungjun Kim, Kyungyong Ko, Hyemin Kang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Atomic layer deposition (ALD) is a promising nanomaterial synthesis technique due to its excellent confomality over complicated nanostructure. We fabricated ALD semiconducting oxide/semiconductor core-shell nanowire array and characterized the device performances as a photodiode. Si nanowires array with about 100∼300 nm diameter were prepared using electroless etching technique. Nitrogen doped ALD ZnO was carried out using diethylzinc (DEZ) and diluted NH4OH various growth temperature. We measured responsivity and external quantum efficiency of the fabricated device as a function of wavelength of incident light and compared with thin film based photodiode. For NW array device, the photocurrent density and responsivity were significantly enhanced compared to thin film based device. Also, by combining self-assembly process, well ordered core-shell ZnO/Si nanowire arrays were prepared. The device performance made of ordered core-shell NW arrays was significantly enhanced. In addition, ZnO homojunction NW photodiode as well as ALD TiO2 outer shell NW photodiodes were fabricated and their device characterizations were compared to the planar type device.

Original languageEnglish
Title of host publicationAtomic Layer Deposition Applications 8
Pages127-133
Number of pages7
Edition13
DOIs
Publication statusPublished - 2012 Dec 1
EventSymposium on Atomic Layer Deposition Applications 8 - 222nd ECS Meeting/PRiME 2012 - Honolulu, HI, United States
Duration: 2012 Oct 72012 Oct 12

Publication series

NameECS Transactions
Number13
Volume50
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherSymposium on Atomic Layer Deposition Applications 8 - 222nd ECS Meeting/PRiME 2012
CountryUnited States
CityHonolulu, HI
Period12/10/712/10/12

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Kim, H., Ko, K., & Kang, H. (2012). High performance core-shell nanowire array devices prepared by atomic layer deposition. In Atomic Layer Deposition Applications 8 (13 ed., pp. 127-133). (ECS Transactions; Vol. 50, No. 13). https://doi.org/10.1149/05013.0127ecst