Abstract
Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm2) from a stacked spiral inductor on a glass substrate. Also, 1.75nH and a peak Q of 57 at 10GHz have been obtained from a levitated spiral inductor.
| Original language | English |
|---|---|
| Pages (from-to) | 1523-1526 |
| Number of pages | 4 |
| Journal | IEEE MTT-S International Microwave Symposium Digest |
| Volume | 4 |
| Publication status | Published - 1999 |
| Event | Proceedings of the 1999 IEEE MTT-S International Microwave Symposium Digest 'The Magic Touch of Microwaves' - Anaheim, CA, USA Duration: 1999 Jun 13 → 1999 Jun 19 |
All Science Journal Classification (ASJC) codes
- Radiation
- Condensed Matter Physics
- Electrical and Electronic Engineering