High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

Jun Bo Yoon, Chul Hi Han, Euisik Yoon, Choong Ki Kim

Research output: Contribution to journalConference article

54 Citations (Scopus)

Abstract

Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm2) from a stacked spiral inductor on a glass substrate. Also, 1.75nH and a peak Q of 57 at 10GHz have been obtained from a levitated spiral inductor.

Original languageEnglish
Pages (from-to)1523-1526
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume4
Publication statusPublished - 1999 Dec 1
EventProceedings of the 1999 IEEE MTT-S International Microwave Symposium Digest 'The Magic Touch of Microwaves' - Anaheim, CA, USA
Duration: 1999 Jun 131999 Jun 19

Fingerprint

Micromachining
Monolithic microwave integrated circuits
inductors
micromachining
chips
Glass
occupation
Substrates
glass

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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abstract = "Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm2) from a stacked spiral inductor on a glass substrate. Also, 1.75nH and a peak Q of 57 at 10GHz have been obtained from a levitated spiral inductor.",
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High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC. / Yoon, Jun Bo; Han, Chul Hi; Yoon, Euisik; Kim, Choong Ki.

In: IEEE MTT-S International Microwave Symposium Digest, Vol. 4, 01.12.1999, p. 1523-1526.

Research output: Contribution to journalConference article

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T1 - High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC

AU - Yoon, Jun Bo

AU - Han, Chul Hi

AU - Yoon, Euisik

AU - Kim, Choong Ki

PY - 1999/12/1

Y1 - 1999/12/1

N2 - Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm2) from a stacked spiral inductor on a glass substrate. Also, 1.75nH and a peak Q of 57 at 10GHz have been obtained from a levitated spiral inductor.

AB - Using novel micromachining technology, various three-dimensional (3D) on-chip inductors have been fabricated to achieve high performance and small area occupation for GHz applications. We have obtained 14nH, a peak Q of 38 at 1.8GHz with area occupation of 500μm by 500μm excluding pads (56nH/mm2) from a stacked spiral inductor on a glass substrate. Also, 1.75nH and a peak Q of 57 at 10GHz have been obtained from a levitated spiral inductor.

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