High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires

Jin Seo Noh, Hyunsu Kim, Beom Seok Kim, Eunyoung Lee, Hyung Hee Cho, Wooyoung Lee

Research output: Contribution to journalArticle

51 Citations (Scopus)

Abstract

We fabricated Pd-coated rough Si nanowires, using a combination of Si electroless etching and Pd sputtering. The semi-densely distributed, vertical-standing rough Si nanowires, which were clustered locally with inter-cluster distances of several nm to several μm, were selected as a basal platform. Pd was coated only on the upper part of the Si nanowires in the semi-dense configuration, and their surface profile replicated the surface morphology of Si nanowires. The Pd-coated rough Si nanowires showed good reversibility and excellent hydrogen-sensing performance in terms of sensitivity (>300%), response time (<3 s), and detection limit (∼5 ppm). These attributes are discussed in terms of the vertical-standing nanowire structures and the rough surface effect of the nanowires. Interestingly, the variation in sensitivity of the Pd-coated Si nanowire sensors was divided into two regimes, which appeared in the low and high hydrogen concentration ranges, respectively. A simple model is also provided to account for this unusual finding.

Original languageEnglish
Pages (from-to)15935-15939
Number of pages5
JournalJournal of Materials Chemistry
Volume21
Issue number40
DOIs
Publication statusPublished - 2011 Oct 28

Fingerprint

Nanowires
Hydrogen
Sensors
Surface morphology
Sputtering
Etching

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Chemistry

Cite this

Noh, Jin Seo ; Kim, Hyunsu ; Kim, Beom Seok ; Lee, Eunyoung ; Cho, Hyung Hee ; Lee, Wooyoung. / High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires. In: Journal of Materials Chemistry. 2011 ; Vol. 21, No. 40. pp. 15935-15939.
@article{69401a209abe41619b448ca8317ea66f,
title = "High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires",
abstract = "We fabricated Pd-coated rough Si nanowires, using a combination of Si electroless etching and Pd sputtering. The semi-densely distributed, vertical-standing rough Si nanowires, which were clustered locally with inter-cluster distances of several nm to several μm, were selected as a basal platform. Pd was coated only on the upper part of the Si nanowires in the semi-dense configuration, and their surface profile replicated the surface morphology of Si nanowires. The Pd-coated rough Si nanowires showed good reversibility and excellent hydrogen-sensing performance in terms of sensitivity (>300{\%}), response time (<3 s), and detection limit (∼5 ppm). These attributes are discussed in terms of the vertical-standing nanowire structures and the rough surface effect of the nanowires. Interestingly, the variation in sensitivity of the Pd-coated Si nanowire sensors was divided into two regimes, which appeared in the low and high hydrogen concentration ranges, respectively. A simple model is also provided to account for this unusual finding.",
author = "Noh, {Jin Seo} and Hyunsu Kim and Kim, {Beom Seok} and Eunyoung Lee and Cho, {Hyung Hee} and Wooyoung Lee",
year = "2011",
month = "10",
day = "28",
doi = "10.1039/c1jm12701b",
language = "English",
volume = "21",
pages = "15935--15939",
journal = "Journal of Materials Chemistry",
issn = "0959-9428",
publisher = "Royal Society of Chemistry",
number = "40",

}

High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires. / Noh, Jin Seo; Kim, Hyunsu; Kim, Beom Seok; Lee, Eunyoung; Cho, Hyung Hee; Lee, Wooyoung.

In: Journal of Materials Chemistry, Vol. 21, No. 40, 28.10.2011, p. 15935-15939.

Research output: Contribution to journalArticle

TY - JOUR

T1 - High-performance vertical hydrogen sensors using Pd-coated rough Si nanowires

AU - Noh, Jin Seo

AU - Kim, Hyunsu

AU - Kim, Beom Seok

AU - Lee, Eunyoung

AU - Cho, Hyung Hee

AU - Lee, Wooyoung

PY - 2011/10/28

Y1 - 2011/10/28

N2 - We fabricated Pd-coated rough Si nanowires, using a combination of Si electroless etching and Pd sputtering. The semi-densely distributed, vertical-standing rough Si nanowires, which were clustered locally with inter-cluster distances of several nm to several μm, were selected as a basal platform. Pd was coated only on the upper part of the Si nanowires in the semi-dense configuration, and their surface profile replicated the surface morphology of Si nanowires. The Pd-coated rough Si nanowires showed good reversibility and excellent hydrogen-sensing performance in terms of sensitivity (>300%), response time (<3 s), and detection limit (∼5 ppm). These attributes are discussed in terms of the vertical-standing nanowire structures and the rough surface effect of the nanowires. Interestingly, the variation in sensitivity of the Pd-coated Si nanowire sensors was divided into two regimes, which appeared in the low and high hydrogen concentration ranges, respectively. A simple model is also provided to account for this unusual finding.

AB - We fabricated Pd-coated rough Si nanowires, using a combination of Si electroless etching and Pd sputtering. The semi-densely distributed, vertical-standing rough Si nanowires, which were clustered locally with inter-cluster distances of several nm to several μm, were selected as a basal platform. Pd was coated only on the upper part of the Si nanowires in the semi-dense configuration, and their surface profile replicated the surface morphology of Si nanowires. The Pd-coated rough Si nanowires showed good reversibility and excellent hydrogen-sensing performance in terms of sensitivity (>300%), response time (<3 s), and detection limit (∼5 ppm). These attributes are discussed in terms of the vertical-standing nanowire structures and the rough surface effect of the nanowires. Interestingly, the variation in sensitivity of the Pd-coated Si nanowire sensors was divided into two regimes, which appeared in the low and high hydrogen concentration ranges, respectively. A simple model is also provided to account for this unusual finding.

UR - http://www.scopus.com/inward/record.url?scp=80053518267&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=80053518267&partnerID=8YFLogxK

U2 - 10.1039/c1jm12701b

DO - 10.1039/c1jm12701b

M3 - Article

AN - SCOPUS:80053518267

VL - 21

SP - 15935

EP - 15939

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

SN - 0959-9428

IS - 40

ER -