High-precision tilt sensor using a folded Mach-Zehnder geometry in-phase and quadrature interferometer

June Gyu Park, Kyuman Cho

Research output: Contribution to journalArticlepeer-review

Abstract

A new high-sensitivity homodyne in-phase and quadrature (I/Q) -interferometer scheme for measuring the tilt change of a target is presented. The new tilt sensor is a Mach-Zehnder interferometer folded by the target, in which the phase change is induced by the in-plane tilt change of the target but is not sensitive to any other motions. The interferometer is specially designed to minimize interferences caused by environmental perturbations. The induced phase is directly measured by using the I/Q-demodulation scheme. The tilt sensor exhibits an excellent sensitivity 10 prad/Hz1/2 at a frequency slightly above 1 Hz and a 0.4 prad/Hz1/2 at a frequency higher than 30 Hz.

Original languageEnglish
Pages (from-to)2155-2159
Number of pages5
JournalApplied Optics
Volume55
Issue number9
DOIs
Publication statusPublished - 2016 Mar 20

Bibliographical note

Publisher Copyright:
© 2016 Optical Society of America.

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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