High quality microcrystalline silicon-carbide films prepared by photo-CVD method using ethylene gas as a carbon source

Seung Yeop Myong, L. E.E. Hyung Kew, Euisik Yoon, L. I.M. Koeng Su

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science

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