High-quality parallel patterning of carbon nanotube thin films by a pulsed laser beam

Myungo Joo, Myeongkyu Lee

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Single-walled carbon nanotube thin films solution-deposited on the glass substrate were directly patterned by a spatially-modulated pulsed laser beam (wavelength = 355 nm, pulse width = 5 ns) incident from the backside of the substrate. This method utilizes a ultrashort pulse-induced strong thermo-elastic force exerting on the film which plays a role to detach it from the substrate. The threshold energy density required for patterning was as low as 90 mJ/cm 2, making it possible to pattern over a few square centimeters by a single pulse with maximum energy of 180 mJ. The irradiated regions of the film were clearly photoetched without leaving any residual nanotubes. High-fidelity patterns could be fabricated with a feature size of 35 μm.

Original languageEnglish
Pages (from-to)3971-3974
Number of pages4
JournalThin Solid Films
Volume520
Issue number11
DOIs
Publication statusPublished - 2012 Mar 30

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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