High-quality Si3N4 circuits as a platform for graphene-based nanophotonic devices

N. Gruhler, C. Benz, H. Jang, J. H. Ahn, R. Danneau, W. H.P. Pernice

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30 Citations (Scopus)


Hybrid circuits combining traditional nanophotonic components with carbon-based materials are emerging as a promising platform for optoelectronic devices. We demonstrate such circuits by integrating singlelayer graphene films with silicon nitride waveguides as a new architecture for broadband optical operation. Using high-quality microring resonators and Mach-Zehnder interferometers with extinction ratios beyond 40 dB we realize flexible circuits for phase-sensitive detection on chip. Hybrid graphene-photonic devices are fabricated via mechanical transfer and lithographic structuring, allowing for prolonged light-matter interactions. Our approach holds promise for studying optical processes in lowdimensional physical systems and for realizing electrically tunable photonic circuits.

Original languageEnglish
Pages (from-to)31678-31689
Number of pages12
JournalOptics Express
Issue number25
Publication statusPublished - 2013 Dec 16

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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    Gruhler, N., Benz, C., Jang, H., Ahn, J. H., Danneau, R., & Pernice, W. H. P. (2013). High-quality Si3N4 circuits as a platform for graphene-based nanophotonic devices. Optics Express, 21(25), 31678-31689. https://doi.org/10.1364/OE.21.031678