High-resolution laser direct writing with a plasmonic contact probe

Howon Jung, Yongwoo Kim, Seok Kim, Jinhee Jang, Jae Won Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We developed a contact-probe-based laser direct writing technique with nanometer scale resolution. The probe uses a solid-immersion-lens (SIL) or a bowtie nano-aperture to enhance the resolution in laser direct writing method and scans sample surface in contact mode for high scan speed. The bowtie shaped nano-aperture is fabricated by focused ion beam (FIB) milling on the metal film coated on cantilever type probe tip and dielectric material (Diamond-like carbon) is covered the probe for surface protection. Using a plasmonic contact probe, we obtained an optical spot beyond the diffraction limit and the size of spot was less than 30 nm at 405 nm wavelength. The proposed probe is integrated with a conventional laser direct writing system and by getting rid of external gap control unit for near-field writing, we achieved high scan speed (∼10 mm/s). The raster scan mode for the arbitrary patterning was developed for practical applications. Furthermore, we designed developing a parallel maskless writing system for high throughput with an array of contact probes.

Original languageEnglish
Title of host publicationAlternative Lithographic Technologies IV
PublisherSPIE
Volume8323
ISBN (Print)9780819489791
DOIs
Publication statusPublished - 2012 Jan 1
EventAlternative Lithographic Technologies IV - San Jose, CA, United States
Duration: 2012 Feb 132012 Feb 16

Other

OtherAlternative Lithographic Technologies IV
CountryUnited States
CitySan Jose, CA
Period12/2/1312/2/16

Fingerprint

Plasmonics
Probe
High Resolution
Contact
Laser
Lasers
probes
high resolution
lasers
apertures
Diamond
Focused ion beams
Cantilever
Patterning
Near-field
Immersion
Strombus or kite or diamond
metal films
submerging
High Throughput

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Jung, H., Kim, Y., Kim, S., Jang, J., & Hahn, J. W. (2012). High-resolution laser direct writing with a plasmonic contact probe. In Alternative Lithographic Technologies IV (Vol. 8323). [83232A] SPIE. https://doi.org/10.1117/12.916359
Jung, Howon ; Kim, Yongwoo ; Kim, Seok ; Jang, Jinhee ; Hahn, Jae Won. / High-resolution laser direct writing with a plasmonic contact probe. Alternative Lithographic Technologies IV. Vol. 8323 SPIE, 2012.
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Jung, H, Kim, Y, Kim, S, Jang, J & Hahn, JW 2012, High-resolution laser direct writing with a plasmonic contact probe. in Alternative Lithographic Technologies IV. vol. 8323, 83232A, SPIE, Alternative Lithographic Technologies IV, San Jose, CA, United States, 12/2/13. https://doi.org/10.1117/12.916359

High-resolution laser direct writing with a plasmonic contact probe. / Jung, Howon; Kim, Yongwoo; Kim, Seok; Jang, Jinhee; Hahn, Jae Won.

Alternative Lithographic Technologies IV. Vol. 8323 SPIE, 2012. 83232A.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Jung H, Kim Y, Kim S, Jang J, Hahn JW. High-resolution laser direct writing with a plasmonic contact probe. In Alternative Lithographic Technologies IV. Vol. 8323. SPIE. 2012. 83232A https://doi.org/10.1117/12.916359