High-resolution laser direct writing with a plasmonic contact probe

Howon Jung, Yongwoo Kim, Seok Kim, Jinhee Jang, Jae W. Hahn

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We developed a contact-probe-based laser direct writing technique with nanometer scale resolution. The probe uses a solid-immersion-lens (SIL) or a bowtie nano-aperture to enhance the resolution in laser direct writing method and scans sample surface in contact mode for high scan speed. The bowtie shaped nano-aperture is fabricated by focused ion beam (FIB) milling on the metal film coated on cantilever type probe tip and dielectric material (Diamond-like carbon) is covered the probe for surface protection. Using a plasmonic contact probe, we obtained an optical spot beyond the diffraction limit and the size of spot was less than 30 nm at 405 nm wavelength. The proposed probe is integrated with a conventional laser direct writing system and by getting rid of external gap control unit for near-field writing, we achieved high scan speed (∼10 mm/s). The raster scan mode for the arbitrary patterning was developed for practical applications. Furthermore, we designed developing a parallel maskless writing system for high throughput with an array of contact probes.

Original languageEnglish
Title of host publicationAlternative Lithographic Technologies IV
PublisherSPIE
ISBN (Print)9780819489791
DOIs
Publication statusPublished - 2012 Jan 1
EventAlternative Lithographic Technologies IV - San Jose, CA, United States
Duration: 2012 Feb 132012 Feb 16

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8323
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherAlternative Lithographic Technologies IV
CountryUnited States
CitySan Jose, CA
Period12/2/1312/2/16

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Jung, H., Kim, Y., Kim, S., Jang, J., & Hahn, J. W. (2012). High-resolution laser direct writing with a plasmonic contact probe. In Alternative Lithographic Technologies IV [83232A] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8323). SPIE. https://doi.org/10.1117/12.916359