High-speed plasmonic nanolithography with a solid immersion lens-based plasmonic optical head

Taeseob Kim, Won Sup Lee, Hang Eun Joe, Geon Lim, Guk Jong Choi, Myeong Gu Gang, Sung Mook Kang, Kyoung Su Park, Byung Kwon Min, Young Pil Park, No Cheol Park

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16 Citations (Scopus)

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