High-speed time-domain characterization method for polygon scanners

Youn Young Ji, Byung Hwy So, Dug Young Kim

Research output: Contribution to journalArticle

Abstract

Two major advantages of polygon scanners over galvano scanners are their fast scanning speed and linear scanning motion. However, a polygon scanner has a fundamental problem associated with the irregularity of its structure due to unequal facet-to-facet angles. Conventional methods rely on geometrical measurements of the polygon mirror structure; though accurate, they are time-consuming and do not show other scanning errors in the real beam scanning action. We propose a simple and fast time-domain characterization method that can show the structural defects of a polygon mirror as well as other scanning jitter that exists only when it is in motion. A laser beam's optical power passing through a slit is measured using a fast detector and digitizer. By analyzing repeated pulse patterns in the data, we can estimate facet-to-facet angles and other scanning jitter of a polygon mirror. Our proposed method is experimentally demonstrated by measuring three polygon mirrors with 12 facets.

Original languageEnglish
Pages (from-to)278-286
Number of pages9
JournalMeasurement: Journal of the International Measurement Confederation
Volume135
DOIs
Publication statusPublished - 2019 Mar 1

Fingerprint

polygons
scanners
high speed
flat surfaces
Scanning
scanning
mirrors
Mirrors
Jitter
vibration
analog to digital converters
irregularities
Laser beams
slits
laser beams
Detectors
Defects
detectors
defects
estimates

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

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High-speed time-domain characterization method for polygon scanners. / Ji, Youn Young; So, Byung Hwy; Kim, Dug Young.

In: Measurement: Journal of the International Measurement Confederation, Vol. 135, 01.03.2019, p. 278-286.

Research output: Contribution to journalArticle

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