High thermal stability of Ni monosilicide from Ni-Ta alloy films on Si(100)

Min Joo Kim, Hyo Jick Choi, Dae Hong Ko, Ja Hum Ku, Siyoung Choi, Kazuyuki Fujihara, Cheol Woong Yang

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint Dive into the research topics of 'High thermal stability of Ni monosilicide from Ni-Ta alloy films on Si(100)'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy