High-Throughput Open-Air Plasma Activation of Metal-Oxide Thin Films with Low Thermal Budget

Young Jun Tak, Florian Hilt, Scott Keene, Won Gi Kim, Reinhold H. Dauskardt, Alberto Salleo, Hyun Jae Kim

Research output: Contribution to journalArticle

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science