Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt

Jaehong Lee, Jaehong Yoon, Hyun Gu Kim, Subin Kang, Woo Suk Oh, Hassan Algadi, Saleh Al-Sayari, Bonggeun Shong, Soo Hyun Kim, Hyungjun Kim, Taeyoon Lee, Han Bo Ram Lee

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Thermal atomic layer deposition (ALD) of metal has generally been achieved at high temperatures of around 300°C or at relatively low temperatures with highly reactive counter reactants, including plasma radicals and O3, which can induce severe damage to substrates. Here, the growth of metallic Pt layers by ALD at a low temperature of 80°C is achieved by using [(1,2,5,6-η)-1,5-hexadiene]-dimethyl-platinum(II) (HDMP) and O2 as the Pt precursor and counter reactant, respectively. ALD results in the successful growth of continuous Pt layers at the low temperature without any reactive reactants owing to the low activation energy of the HDMP precursor for surface reactions. Because of the high reactivity of the precursor, the growth of a pure Pt layer is achieved on various thermally weak substrates, leading to the fabrication of high-performance conductive cotton fibers by ALD. A capacitive-type textile pressure sensor is successfully demonstrated by stacking elastomeric rubber-coated conductive cotton fibers perpendicularly and integrating them onto a fabric with a 7 × 8 array configuration to identify the features of the applied pressure, which can be effectively utilized as a new platform for future wearable and textile electronics.

Original languageEnglish
Article numbere331
JournalNPG Asia Materials
Volume8
Issue number11
DOIs
Publication statusPublished - 2016 Nov 25

Fingerprint

Atomic layer deposition
textiles
atomic layer epitaxy
cotton fibers
Electronics
Fiber
hexadiene
Cotton fibers
fibers
Fibers
Platinum
electronics
Textiles
Precursor
counters
platinum
Temperature
Rubber
Surface reactions
Pressure sensors

All Science Journal Classification (ASJC) codes

  • Modelling and Simulation
  • Materials Science(all)
  • Condensed Matter Physics

Cite this

Lee, Jaehong ; Yoon, Jaehong ; Kim, Hyun Gu ; Kang, Subin ; Oh, Woo Suk ; Algadi, Hassan ; Al-Sayari, Saleh ; Shong, Bonggeun ; Kim, Soo Hyun ; Kim, Hyungjun ; Lee, Taeyoon ; Lee, Han Bo Ram. / Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt. In: NPG Asia Materials. 2016 ; Vol. 8, No. 11.
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abstract = "Thermal atomic layer deposition (ALD) of metal has generally been achieved at high temperatures of around 300°C or at relatively low temperatures with highly reactive counter reactants, including plasma radicals and O3, which can induce severe damage to substrates. Here, the growth of metallic Pt layers by ALD at a low temperature of 80°C is achieved by using [(1,2,5,6-η)-1,5-hexadiene]-dimethyl-platinum(II) (HDMP) and O2 as the Pt precursor and counter reactant, respectively. ALD results in the successful growth of continuous Pt layers at the low temperature without any reactive reactants owing to the low activation energy of the HDMP precursor for surface reactions. Because of the high reactivity of the precursor, the growth of a pure Pt layer is achieved on various thermally weak substrates, leading to the fabrication of high-performance conductive cotton fibers by ALD. A capacitive-type textile pressure sensor is successfully demonstrated by stacking elastomeric rubber-coated conductive cotton fibers perpendicularly and integrating them onto a fabric with a 7 × 8 array configuration to identify the features of the applied pressure, which can be effectively utilized as a new platform for future wearable and textile electronics.",
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Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt. / Lee, Jaehong; Yoon, Jaehong; Kim, Hyun Gu; Kang, Subin; Oh, Woo Suk; Algadi, Hassan; Al-Sayari, Saleh; Shong, Bonggeun; Kim, Soo Hyun; Kim, Hyungjun; Lee, Taeyoon; Lee, Han Bo Ram.

In: NPG Asia Materials, Vol. 8, No. 11, e331, 25.11.2016.

Research output: Contribution to journalArticle

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AU - Lee, Jaehong

AU - Yoon, Jaehong

AU - Kim, Hyun Gu

AU - Kang, Subin

AU - Oh, Woo Suk

AU - Algadi, Hassan

AU - Al-Sayari, Saleh

AU - Shong, Bonggeun

AU - Kim, Soo Hyun

AU - Kim, Hyungjun

AU - Lee, Taeyoon

AU - Lee, Han Bo Ram

PY - 2016/11/25

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