Highly flexible Al-doped ZnO/Ag/Al-doped ZnO multilayer films deposited on PET substrates at room temperature

Jun Ho Kim, Da Som Kim, Sun Kyung Kim, Young Zo Yoo, Jeong Hwan Lee, Sang Woo Kim, Tae Yeon Seong

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19 Citations (Scopus)


We investigated the effects of the Ag layer thickness on the electrical and optical properties of AZO (36 nm)/Ag/AZO (36 nm) multilayer films that were deposited on polyethylene terephthalate (PET) substrates using a radio frequency magnetron sputtering method. The AZO/Ag/AZO films had transmittances over 74–89% at 550 nm. The relationship between the transmittance and the Ag layer thickness was investigated with three-dimensional finite-difference time-domain (3D FDTD) simulations to understand high transmittance. As the Ag layer thickness increased from 15 to 23 nm, the carrier concentration increased from 5.84×1021 to 9.66×1021 cm−3, while the sheet resistance decreased from 10.15 to 3.47 Ω sq−1. The Haacke figure of merit (FOM) was calculated for the samples with various Ag layer thicknesses; it was a maximum at 19 nm (43.9×10−3 Ω−1). The resistance change for the 100 nm-thick ITO only films was unstable even after 5 cycles, while that of the AZO (36 nm)/Ag (19 nm)/AZO (36 nm) film remained constant up to 1000 cycles.

Original languageEnglish
Pages (from-to)3473-3478
Number of pages6
JournalCeramics International
Issue number2
Publication statusPublished - 2016

Bibliographical note

Funding Information:
This work was supported by the Korea Evaluation Institute of Industrial Technology (Grant no. 10049601 ) and WC300 R&D (Grant no. S2317456) through Korea Institute for Advancement of Technology (KIAT) which is funded by the Small and Medium Business Administration, Korea. S.-K.K. was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF), which is funded by the Ministry of Science, ICT, and Future Planning ( NRF-2013R1A1A1059423 ).

Publisher Copyright:
© 2015 Elsevier Ltd and Techna Group S.r.l.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Materials Chemistry


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