Highly Miniaturized RF Bandpass Filter Based on Thin-Film Bulk Acoustic-Wave Resonator for 5-GHz-Band Application

Yong Dae Kim; Kuk Hyun Sunwoo; Sang Chul Sul; Ju Ho Lee; Duck Hwan Kim; In Sang Song; Sung Hoon Choa; Jong Gwan Yook

doi:10.1109/TMTT.2005.864100

Highly Miniaturized RF Bandpass Filter Based on Thin-Film Bulk Acoustic-Wave Resonator for 5-GHz-Band Application

Yong Dae Kim, Kuk Hyun Sunwoo, Sang Chul Sul, Ju Ho Lee, Duck Hwan Kim, In Sang Song, Sung Hoon Choa, Jong Gwan Yook

Department of Electrical and Electronic Engineering

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Highly miniaturized RF bandpass filter using a thin-film bulk acoustic wave resonator (TFBAR) is designed and fabricated for 5-GHz-band application. The topology of the fabricated filter is based on a ladder-type configuration that has a common trimming inductor connected concurrently with two shunt TFBARs and the trimming inductor is directly connected to the ground. The role of unit the TFBAR's physical characteristics such as the size and thickness of the TFBAR determine the performance of the TFBAR filter, including the effect of the electrical impedance-matching characteristics of the TFBAR filter. The shape of the fabricated TFBARs are tetragons with unparallel sides and the sizes of resonator are smaller than 70 × 70 μm ² to ensure the ranges of impedance-matched filter performance. The insertion loss and bandwidth of fabricated TFBAR filters are less than 2.8 dB and 160 MHz at 3 dB. The out-of-band rejection is over 30 dB. The actual size of filter is smaller than 700 × 600 μm ², including signal and ground pad sizes.

Original language	English
Pages (from-to)	1218-1228
Number of pages	11
Journal	IEEE Transactions on Microwave Theory and Techniques
Volume	54
Issue number	3
DOIs	https://doi.org/10.1109/TMTT.2005.864100
Publication status	Published - 2006 Mar

Bibliographical note

Funding Information:
Manuscript received September 10, 2005; revised October 31, 2005. This work was supported by the Center for Advanced Transceiver Systems under Ministry of Commerce, Industry, and Energy 427723.

All Science Journal Classification (ASJC) codes

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TMTT.2005.864100

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title = "Highly Miniaturized RF Bandpass Filter Based on Thin-Film Bulk Acoustic-Wave Resonator for 5-GHz-Band Application",

abstract = "Highly miniaturized RF bandpass filter using a thin-film bulk acoustic wave resonator (TFBAR) is designed and fabricated for 5-GHz-band application. The topology of the fabricated filter is based on a ladder-type configuration that has a common trimming inductor connected concurrently with two shunt TFBARs and the trimming inductor is directly connected to the ground. The role of unit the TFBAR's physical characteristics such as the size and thickness of the TFBAR determine the performance of the TFBAR filter, including the effect of the electrical impedance-matching characteristics of the TFBAR filter. The shape of the fabricated TFBARs are tetragons with unparallel sides and the sizes of resonator are smaller than 70 × 70 μm 2 to ensure the ranges of impedance-matched filter performance. The insertion loss and bandwidth of fabricated TFBAR filters are less than 2.8 dB and 160 MHz at 3 dB. The out-of-band rejection is over 30 dB. The actual size of filter is smaller than 700 × 600 μm 2, including signal and ground pad sizes.",

author = "Kim, {Yong Dae} and Sunwoo, {Kuk Hyun} and Sul, {Sang Chul} and Lee, {Ju Ho} and Kim, {Duck Hwan} and Song, {In Sang} and Choa, {Sung Hoon} and Yook, {Jong Gwan}",

note = "Funding Information: Manuscript received September 10, 2005; revised October 31, 2005. This work was supported by the Center for Advanced Transceiver Systems under Ministry of Commerce, Industry, and Energy 427723.",

year = "2006",

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doi = "10.1109/TMTT.2005.864100",

language = "English",

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AU - Kim, Yong Dae

AU - Sunwoo, Kuk Hyun

AU - Sul, Sang Chul

AU - Lee, Ju Ho

AU - Kim, Duck Hwan

AU - Song, In Sang

AU - Choa, Sung Hoon

AU - Yook, Jong Gwan

N1 - Funding Information: Manuscript received September 10, 2005; revised October 31, 2005. This work was supported by the Center for Advanced Transceiver Systems under Ministry of Commerce, Industry, and Energy 427723.

PY - 2006/3

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N2 - Highly miniaturized RF bandpass filter using a thin-film bulk acoustic wave resonator (TFBAR) is designed and fabricated for 5-GHz-band application. The topology of the fabricated filter is based on a ladder-type configuration that has a common trimming inductor connected concurrently with two shunt TFBARs and the trimming inductor is directly connected to the ground. The role of unit the TFBAR's physical characteristics such as the size and thickness of the TFBAR determine the performance of the TFBAR filter, including the effect of the electrical impedance-matching characteristics of the TFBAR filter. The shape of the fabricated TFBARs are tetragons with unparallel sides and the sizes of resonator are smaller than 70 × 70 μm 2 to ensure the ranges of impedance-matched filter performance. The insertion loss and bandwidth of fabricated TFBAR filters are less than 2.8 dB and 160 MHz at 3 dB. The out-of-band rejection is over 30 dB. The actual size of filter is smaller than 700 × 600 μm 2, including signal and ground pad sizes.

AB - Highly miniaturized RF bandpass filter using a thin-film bulk acoustic wave resonator (TFBAR) is designed and fabricated for 5-GHz-band application. The topology of the fabricated filter is based on a ladder-type configuration that has a common trimming inductor connected concurrently with two shunt TFBARs and the trimming inductor is directly connected to the ground. The role of unit the TFBAR's physical characteristics such as the size and thickness of the TFBAR determine the performance of the TFBAR filter, including the effect of the electrical impedance-matching characteristics of the TFBAR filter. The shape of the fabricated TFBARs are tetragons with unparallel sides and the sizes of resonator are smaller than 70 × 70 μm 2 to ensure the ranges of impedance-matched filter performance. The insertion loss and bandwidth of fabricated TFBAR filters are less than 2.8 dB and 160 MHz at 3 dB. The out-of-band rejection is over 30 dB. The actual size of filter is smaller than 700 × 600 μm 2, including signal and ground pad sizes.

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Highly Miniaturized RF Bandpass Filter Based on Thin-Film Bulk Acoustic-Wave Resonator for 5-GHz-Band Application

Abstract

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All Science Journal Classification (ASJC) codes

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