Highly ordered large-area colloid templates for nanostructured TiO 2 thin film gas sensors

Hi Gyu Moon, Young Seok Shim, Do Hong Kim, Ho Won Jang, Seung Hee Han, Hyung Ho Park, Soek Jin Yoon

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We report a novel process that uses highly ordered colloidal templating to fabricate nanostructured TiO 2 thin film gas sensors. An O 2 plasma treatment is used to decrease the contact angle of a water droplet on a SiO 2/Si substrate from 46° to 3°C. The formation of this hydrophilic surface enhances the adhesion of polystyrene microspheres to the substrate during the spin coating of the colloidal solution, leading to a large-area colloid template of closely packed monolayer microspheres on the substrates. Embossed TiO 2 thin film gas sensors fabricated through highly ordered colloidal templating using O 2 plasma exhibit substantially enhanced gas sensing performance as compared to those without surface treatments prior to colloidal templating.

Original languageEnglish
Pages (from-to)3496-3500
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Volume12
Issue number4
DOIs
Publication statusPublished - 2012

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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