We report a novel process that uses highly ordered colloidal templating to fabricate nanostructured TiO 2 thin film gas sensors. An O 2 plasma treatment is used to decrease the contact angle of a water droplet on a SiO 2/Si substrate from 46° to 3°C. The formation of this hydrophilic surface enhances the adhesion of polystyrene microspheres to the substrate during the spin coating of the colloidal solution, leading to a large-area colloid template of closely packed monolayer microspheres on the substrates. Embossed TiO 2 thin film gas sensors fabricated through highly ordered colloidal templating using O 2 plasma exhibit substantially enhanced gas sensing performance as compared to those without surface treatments prior to colloidal templating.
All Science Journal Classification (ASJC) codes
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics