Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays

Min Ook Kim, Kyounghoon Lee, Hyungjoo Na, Dae Sung Kwon, Jungwook Choi, Jae Ik Lee, Dae Hyun Baek, Jongbaeg Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A highly sensitive cantilever type chemo-mechanical hydrogen sensor with a novel sensing mechanism that can detect changes in contact resistance in self-adjusted carbon nanotube (CNT) arrays is described. The fabricated sensor is fully batch-fabricated on a silicon-on-insulator (SOI) wafer and is composed of two facing sets of CNT arrays, situated between a Pd-coated micro-cantilever, that serve as the electrode and counter-electrode. When the sensor is exposed to various concentrations of hydrogen at room temperature, resistance is decreased as the cantilever deforms and increases inter-CNT contact. Turning off the hydrogen re-shrinks the Pd, restoring the original cantilever position and recovering the initial resistance. The sensor can detect hydrogen diluted in nitrogen at concentrations of up to 4% and has an average response as high as -1.22% to a 0.1% concentration of hydrogen in air, which is the minimum detection limit. This sensitivity, which is much higher than in previously reported cantilever-type resistive chemo-mechanical hydrogen sensors, can be attributed to the novel sensing mechanism in which the narrow-gap between CNT arrays comprise the sensing component.

Original languageEnglish
Pages (from-to)414-421
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume197
DOIs
Publication statusPublished - 2014 Jul 5

Fingerprint

Carbon Nanotubes
Contact resistance
contact resistance
Hydrogen
Carbon nanotubes
carbon nanotubes
sensors
Sensors
hydrogen
Electrodes
electrodes
Silicon
counters
Nitrogen
insulators
wafers
nitrogen
sensitivity
air
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Kim, Min Ook ; Lee, Kyounghoon ; Na, Hyungjoo ; Kwon, Dae Sung ; Choi, Jungwook ; Lee, Jae Ik ; Baek, Dae Hyun ; Kim, Jongbaeg. / Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays. In: Sensors and Actuators, B: Chemical. 2014 ; Vol. 197. pp. 414-421.
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Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays. / Kim, Min Ook; Lee, Kyounghoon; Na, Hyungjoo; Kwon, Dae Sung; Choi, Jungwook; Lee, Jae Ik; Baek, Dae Hyun; Kim, Jongbaeg.

In: Sensors and Actuators, B: Chemical, Vol. 197, 05.07.2014, p. 414-421.

Research output: Contribution to journalArticle

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AU - Baek, Dae Hyun

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