TY - GEN
T1 - Highly sensitive detection of VOC using impact ionization induced by photoelectron
AU - Kang, Yunsung
AU - Jung, Han Il
AU - Baek, Dae Hyun
AU - Lee, Kyounghoon
AU - Pyo, Soonjae
AU - Kim, Jongbaeg
N1 - Publisher Copyright:
© 2017 IEEE.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.
AB - We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.
UR - http://www.scopus.com/inward/record.url?scp=85015730581&partnerID=8YFLogxK
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U2 - 10.1109/MEMSYS.2017.7863371
DO - 10.1109/MEMSYS.2017.7863371
M3 - Conference contribution
AN - SCOPUS:85015730581
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 183
EP - 186
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -