Abstract
We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.
Original language | English |
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Title of host publication | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 183-186 |
Number of pages | 4 |
ISBN (Electronic) | 9781509050789 |
DOIs | |
Publication status | Published - 2017 Feb 23 |
Event | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26 |
Publication series
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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ISSN (Print) | 1084-6999 |
Other
Other | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 |
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Country/Territory | United States |
City | Las Vegas |
Period | 17/1/22 → 17/1/26 |
Bibliographical note
Publisher Copyright:© 2017 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering