Highly sensitive detection of VOC using impact ionization induced by photoelectron

Yunsung Kang, Han Il Jung, Dae Hyun Baek, Kyounghoon Lee, Soonjae Pyo, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages183-186
Number of pages4
ISBN (Electronic)9781509050789
DOIs
Publication statusPublished - 2017 Feb 23
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 2017 Jan 222017 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
CountryUnited States
CityLas Vegas
Period17/1/2217/1/26

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Kang, Y., Jung, H. I., Baek, D. H., Lee, K., Pyo, S., & Kim, J. (2017). Highly sensitive detection of VOC using impact ionization induced by photoelectron. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 183-186). [7863371] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863371