Highly sensitive detection of VOC using impact ionization induced by photoelectron

Yunsung Kang; Han Il Jung; Dae Hyun Baek; Kyounghoon Lee; Soonjae Pyo; Jongbaeg Kim

doi:10.1109/MEMSYS.2017.7863371

Highly sensitive detection of VOC using impact ionization induced by photoelectron

Yunsung Kang, Han Il Jung, Dae Hyun Baek, Kyounghoon Lee, Soonjae Pyo, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	183-186
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863371
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863371

Cite this

Kang, Y., Jung, H. I., Baek, D. H., Lee, K., Pyo, S., & Kim, J. (2017). Highly sensitive detection of VOC using impact ionization induced by photoelectron. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 183-186). [7863371] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863371

Kang, Yunsung ; Jung, Han Il ; Baek, Dae Hyun et al. / Highly sensitive detection of VOC using impact ionization induced by photoelectron. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 183-186 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{f518412c932d48f0a1bb30c90c868219,

title = "Highly sensitive detection of VOC using impact ionization induced by photoelectron",

abstract = "We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.",

author = "Yunsung Kang and Jung, {Han Il} and Baek, {Dae Hyun} and Kyounghoon Lee and Soonjae Pyo and Jongbaeg Kim",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863371",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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address = "United States",

}

Kang, Y, Jung, HI, Baek, DH, Lee, K, Pyo, S & Kim, J 2017, Highly sensitive detection of VOC using impact ionization induced by photoelectron. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863371, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 183-186, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863371

Highly sensitive detection of VOC using impact ionization induced by photoelectron. / Kang, Yunsung; Jung, Han Il; Baek, Dae Hyun et al.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 183-186 7863371 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Kang, Yunsung

AU - Jung, Han Il

AU - Baek, Dae Hyun

AU - Lee, Kyounghoon

AU - Pyo, Soonjae

AU - Kim, Jongbaeg

PY - 2017/2/23

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N2 - We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.

AB - We have developed a highly sensitive volatile organic compounds (VOCs) sensor using impact ionization induced by photoelectron. A novel mechanism of VOC detection, the screening effect of VOC cations, was proposed and experimentally verified for the first time. The fabricated sensor could detect various concentrations of toluene ranging from 500 down to 10 ppm under long wavelength of UV light (254 nm) illumination. In addition, reliable and repeatable sensing characteristics were obtained at the exposure to ethylene with high ionization energy.

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M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 183

EP - 186

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Kang Y, Jung HI, Baek DH, Lee K, Pyo S, Kim J. Highly sensitive detection of VOC using impact ionization induced by photoelectron. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 183-186. 7863371. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863371

Highly sensitive detection of VOC using impact ionization induced by photoelectron

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