Highly sensitive hydrogen sensor based on suspended, functionalized single tungsten nanowire bridge

Jungwook Choi, Jongbaeg Kim

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The sensing tungsten nanowire is synthesized by focused ion beam-chemical vapor deposition (FIB-CVD) using W(CO)6 precursor gas on batch-fabricated microelectrodes. The nanowire measures 10 μm in length and 150 nm in diameter, and is suspended 50 μm above the wafer substrate connecting two microelectrodes to enhance the exposure of nanowire surface to target gas molecules for improved chemisorptions. The nanowire is then functionalized by palladium-platinum (Pd-Pt) sputtering process to be sensitive to the hydrogen molecules. The significant increase of nanowire resistance is observed whenever it is exposed to hydrogen molecules, and the resistance is recovered to the original value after hydrogen molecules are purged out. The experimentally characterized hydrogen sensor shows 11.52% increase of resistance to the exposure to 1% (10,000 ppm) hydrogen and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration measured is 0.001% (10 ppm) with 0.58% corresponding resistance increase.

Original languageEnglish
Pages (from-to)92-98
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume136
Issue number1
DOIs
Publication statusPublished - 2009 Feb 2

Fingerprint

Tungsten
Nanowires
Hydrogen
tungsten
nanowires
sensors
Sensors
hydrogen
Molecules
Microelectrodes
molecules
Gases
Focused ion beams
Palladium
Chemisorption
Platinum
gases
Gas mixtures
chemisorption
Atmospheric pressure

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

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abstract = "A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The sensing tungsten nanowire is synthesized by focused ion beam-chemical vapor deposition (FIB-CVD) using W(CO)6 precursor gas on batch-fabricated microelectrodes. The nanowire measures 10 μm in length and 150 nm in diameter, and is suspended 50 μm above the wafer substrate connecting two microelectrodes to enhance the exposure of nanowire surface to target gas molecules for improved chemisorptions. The nanowire is then functionalized by palladium-platinum (Pd-Pt) sputtering process to be sensitive to the hydrogen molecules. The significant increase of nanowire resistance is observed whenever it is exposed to hydrogen molecules, and the resistance is recovered to the original value after hydrogen molecules are purged out. The experimentally characterized hydrogen sensor shows 11.52{\%} increase of resistance to the exposure to 1{\%} (10,000 ppm) hydrogen and 99{\%} nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration measured is 0.001{\%} (10 ppm) with 0.58{\%} corresponding resistance increase.",
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Highly sensitive hydrogen sensor based on suspended, functionalized single tungsten nanowire bridge. / Choi, Jungwook; Kim, Jongbaeg.

In: Sensors and Actuators, B: Chemical, Vol. 136, No. 1, 02.02.2009, p. 92-98.

Research output: Contribution to journalArticle

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