TY - GEN
T1 - Highly sensitive Si nanowire-based gas sensors for detection of a nerve agent
AU - Kim, Yeonju
AU - Lee, Jun Min
AU - Lee, Seung Hyun
AU - Lee, Wooyoung
PY - 2010
Y1 - 2010
N2 - We report the electrical detection of nerve agent gas using p-type Si-nanowire-based sensors. A combination of electron-beam lithography and a lift-off process was utilized to fabricate individual 50-nm-thick Si nanowire sensors. Using the fabricated Si-nanowire sensors, the detection of DMMP was successfully achieved. Our results suggest that Si-nanowire-based gas sensors can be used to detect dimethylmethylphosphonate (DMMP).
AB - We report the electrical detection of nerve agent gas using p-type Si-nanowire-based sensors. A combination of electron-beam lithography and a lift-off process was utilized to fabricate individual 50-nm-thick Si nanowire sensors. Using the fabricated Si-nanowire sensors, the detection of DMMP was successfully achieved. Our results suggest that Si-nanowire-based gas sensors can be used to detect dimethylmethylphosphonate (DMMP).
UR - http://www.scopus.com/inward/record.url?scp=77951664099&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77951664099&partnerID=8YFLogxK
U2 - 10.1109/INEC.2010.5424551
DO - 10.1109/INEC.2010.5424551
M3 - Conference contribution
AN - SCOPUS:77951664099
SN - 9781424435449
T3 - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
SP - 736
EP - 737
BT - INEC 2010 - 2010 3rd International Nanoelectronics Conference, Proceedings
T2 - 2010 3rd International Nanoelectronics Conference, INEC 2010
Y2 - 3 January 2010 through 8 January 2010
ER -