Abstract
This paper reports a fabrication method of highly transparent closed-cell type porous polydimethylsiloxane (PDMS). The effect of various chemicals together with water was investigated for the inner pore formation when fabricating porous PDMS. Among them, the mixture of water and isopropanol (IPA) into PDMS was effective for reducing the average size of pores. The size and distribution of pores in PDMS were evaluated with an image process technique. In addition, the reducing mechanism of pore size was proposed and experimentally verified through adjusting the ratio of water and IPA in the mixture. This reduced size of inner pores in PDMS results in high transparency.
Original language | English |
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Title of host publication | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 287-290 |
Number of pages | 4 |
ISBN (Electronic) | 9781728135809 |
DOIs | |
Publication status | Published - 2020 Jan |
Event | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: 2020 Jan 18 → 2020 Jan 22 |
Publication series
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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Volume | 2020-January |
ISSN (Print) | 1084-6999 |
Conference
Conference | 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 |
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Country/Territory | Canada |
City | Vancouver |
Period | 20/1/18 → 20/1/22 |
Bibliographical note
Funding Information:This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (2018R1A4A1025986).
Publisher Copyright:
© 2020 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering