Homogeneous liquid crystal molecules on Al2O3 alignment films using atomic layer deposition as a function of deposition temperature

Gun Young Lee, Hong Gyu Park, Hae Chang Jeong, Byeong Yun Oh, Jeong Min Han, Dae Shik Seo

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1 Citation (Scopus)


In this study, we investigated the orientation characteristics of liquid crystals (LCs) on Al2O3 alignment films, which were deposited at three different deposition temperatures by atomic layer deposition (ALD). The deposition temperatures of the ALD process were 100, 200, 300 °C, respectively. To achieve a unidirectional orientation of LC molecules, ion beams were irradiated on the Al2O3 alignment films at an ion beam (IB) incident energy of 2400 eV. The orientation of LC molecules within LC cells, fabricated by the Al2O3 alignment films deposited at different deposition temperature, indicated the horizontal direction of the atomic-layer-deposited Al2O3 alignment films. We confirmed that the LC cells fabricated by Al2O3 alignment films deposited at different deposition temperatures had similar electro-optical (EO) performance and pretilt angle characteristics. Through a physicochemical analysis, we found that Al2O3 films were unaffected by the deposition temperature, which caused similar LC orientation characteristics. In other words, the fact that Al2O3 films deposited by ALD were unaffected by the deposition temperature means that the method using ALD applied on LC alignment films can have a wide deposition temperature range.

Original languageEnglish
Pages (from-to)8402-8406
Number of pages5
JournalJournal of Nanoscience and Nanotechnology
Issue number8
Publication statusPublished - 2016 Aug

Bibliographical note

Publisher Copyright:
Copyright © 2016 American Scientific Publishers All rights reserved.

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics


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