Homogeneously aligned liquid crystal display on silicon oxynitride thin film using ion beam bombardment

Byeong Yun Oh, Young Hwan Kim, Byoung Yong Kim, Sang Keuk Lee, Dae Shik Seo, Jeong Min Han, Jeong Yeon Hwang

Research output: Contribution to journalArticle

3 Citations (Scopus)


This paper introduces the homogeneously aligned liquid crystal (LC) display using ion beam (IB) bombardment of a new silicon oxynitride (SiON) alignment layer for the first time. The pretilt angle was shown to be a function of the IB incident energy, and possible mechanisms of LC alignment were investigated with physical and chemical methods. An X-ray photoelectron spectroscopy analysis showed that the LC alignment on the IB-bombarded SiON inorganic surface was due to the reformation of Si-O bonds as a major factor. The electro-optical characteristics were comparable to those of rubbed polyimide films.

Original languageEnglish
Pages (from-to)355-358
Number of pages4
JournalMaterials Chemistry and Physics
Issue number2-3
Publication statusPublished - 2009 Oct 15


All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics

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