Abstract
We demonstrated humidity sensing characteristics based on a suspended single tungsten nanowire. The nanowire is synthesized on batch-processed microelectrodes by focused ion beam-chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] as the precursor gas. Two different humidity sensing mechanisms, electrothermal sensing and chemical sensing, were demonstrated using as-deposited and annealed nanowires. When the relative humidity level was increased from 30% to 80%, the DC resistance of the as-deposited nanowire immediately showed 5.68% decrease by electrothermal sensing mechanism. Since the as-deposited nanowire is amorphous structure, no chemical sensing response was observed for the as-deposited nanowire case. On the contrary, the tungsten nanowire annealed at 700 C showed a 13.2% increase in its DC resistance by the chemical sensing mechanism when the relative humidity level was increased from 40% to 80%, revealing enhanced sensor responsiveness and improved linearity than the electrothermal sensing using as-deposited nanowire.
| Original language | English |
|---|---|
| Pages (from-to) | 38-44 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 194 |
| DOIs | |
| Publication status | Published - 2014 Apr 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
- Electrical and Electronic Engineering
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Humidity sensing characteristics of focused ion beam-induced suspended single tungsten nanowire. / Sim, Jaesam; Choi, Jungwook; Kim, Jongbaeg.
In: Sensors and Actuators, B: Chemical, Vol. 194, 01.04.2014, p. 38-44.Research output: Contribution to journal › Article
TY - JOUR
T1 - Humidity sensing characteristics of focused ion beam-induced suspended single tungsten nanowire
AU - Sim, Jaesam
AU - Choi, Jungwook
AU - Kim, Jongbaeg
PY - 2014/4/1
Y1 - 2014/4/1
N2 - We demonstrated humidity sensing characteristics based on a suspended single tungsten nanowire. The nanowire is synthesized on batch-processed microelectrodes by focused ion beam-chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] as the precursor gas. Two different humidity sensing mechanisms, electrothermal sensing and chemical sensing, were demonstrated using as-deposited and annealed nanowires. When the relative humidity level was increased from 30% to 80%, the DC resistance of the as-deposited nanowire immediately showed 5.68% decrease by electrothermal sensing mechanism. Since the as-deposited nanowire is amorphous structure, no chemical sensing response was observed for the as-deposited nanowire case. On the contrary, the tungsten nanowire annealed at 700 C showed a 13.2% increase in its DC resistance by the chemical sensing mechanism when the relative humidity level was increased from 40% to 80%, revealing enhanced sensor responsiveness and improved linearity than the electrothermal sensing using as-deposited nanowire.
AB - We demonstrated humidity sensing characteristics based on a suspended single tungsten nanowire. The nanowire is synthesized on batch-processed microelectrodes by focused ion beam-chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] as the precursor gas. Two different humidity sensing mechanisms, electrothermal sensing and chemical sensing, were demonstrated using as-deposited and annealed nanowires. When the relative humidity level was increased from 30% to 80%, the DC resistance of the as-deposited nanowire immediately showed 5.68% decrease by electrothermal sensing mechanism. Since the as-deposited nanowire is amorphous structure, no chemical sensing response was observed for the as-deposited nanowire case. On the contrary, the tungsten nanowire annealed at 700 C showed a 13.2% increase in its DC resistance by the chemical sensing mechanism when the relative humidity level was increased from 40% to 80%, revealing enhanced sensor responsiveness and improved linearity than the electrothermal sensing using as-deposited nanowire.
UR - http://www.scopus.com/inward/record.url?scp=84892778667&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84892778667&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2013.12.073
DO - 10.1016/j.snb.2013.12.073
M3 - Article
VL - 194
SP - 38
EP - 44
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
ER -