Humidity sensing characteristics of focused ion beam-induced suspended single tungsten nanowire

Jaesam Sim, Jungwook Choi, Jongbaeg Kim

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We demonstrated humidity sensing characteristics based on a suspended single tungsten nanowire. The nanowire is synthesized on batch-processed microelectrodes by focused ion beam-chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] as the precursor gas. Two different humidity sensing mechanisms, electrothermal sensing and chemical sensing, were demonstrated using as-deposited and annealed nanowires. When the relative humidity level was increased from 30% to 80%, the DC resistance of the as-deposited nanowire immediately showed 5.68% decrease by electrothermal sensing mechanism. Since the as-deposited nanowire is amorphous structure, no chemical sensing response was observed for the as-deposited nanowire case. On the contrary, the tungsten nanowire annealed at 700 C showed a 13.2% increase in its DC resistance by the chemical sensing mechanism when the relative humidity level was increased from 40% to 80%, revealing enhanced sensor responsiveness and improved linearity than the electrothermal sensing using as-deposited nanowire.

Original languageEnglish
Pages (from-to)38-44
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume194
DOIs
Publication statusPublished - 2014 Apr 1

Fingerprint

Tungsten
Focused ion beams
Nanowires
humidity
Atmospheric humidity
tungsten
nanowires
ion beams
direct current
Microelectrodes
linearity
Chemical vapor deposition
Gases
vapor deposition
sensors
Sensors
gases

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

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title = "Humidity sensing characteristics of focused ion beam-induced suspended single tungsten nanowire",
abstract = "We demonstrated humidity sensing characteristics based on a suspended single tungsten nanowire. The nanowire is synthesized on batch-processed microelectrodes by focused ion beam-chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] as the precursor gas. Two different humidity sensing mechanisms, electrothermal sensing and chemical sensing, were demonstrated using as-deposited and annealed nanowires. When the relative humidity level was increased from 30{\%} to 80{\%}, the DC resistance of the as-deposited nanowire immediately showed 5.68{\%} decrease by electrothermal sensing mechanism. Since the as-deposited nanowire is amorphous structure, no chemical sensing response was observed for the as-deposited nanowire case. On the contrary, the tungsten nanowire annealed at 700 C showed a 13.2{\%} increase in its DC resistance by the chemical sensing mechanism when the relative humidity level was increased from 40{\%} to 80{\%}, revealing enhanced sensor responsiveness and improved linearity than the electrothermal sensing using as-deposited nanowire.",
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Humidity sensing characteristics of focused ion beam-induced suspended single tungsten nanowire. / Sim, Jaesam; Choi, Jungwook; Kim, Jongbaeg.

In: Sensors and Actuators, B: Chemical, Vol. 194, 01.04.2014, p. 38-44.

Research output: Contribution to journalArticle

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