Hybrid fabrication of piezoelectric thick films using a sol-infiltration and photosensitive direct-patterning technique

Jin Hyung Lee, Jeong Hoon Lee, Sang Kyung Kim, Hyung-Ho Park, Tae Song Kim

Research output: Contribution to journalArticle

Abstract

We propose a hybrid fabrication technique for piezoelectric thick films using sol-infiltration and a direct-patterning process. To achieve the demands of high-density and direct-patterning at a low sintering temperature, a photosensitive lead zirconate titanate (PZT) solution was infiltrated into a lead zinc niobate–lead zirconate titanate (PZN–PZT) thick film. The direct-patterned PZT films were formed on a locally screen-printed thick film, using a photomask and UV light. By optimizing the thickness of the photosensitive PZT layer, the hybrid films that were prepared with a 120-s soaking time of PZT sol showed a very dense and uniform microstructure with a large grain size at a low sintering temperature of 800 °C. It also had enhanced electrical properties. The measured remnant polarization (P r ) and coercive field (E c ) were 14.61 μC cm −2 and 24.16 kV cm −1 , respectively. The P r value was over four times greater than those of the screen-printed films. We fabricated array-type piezoelectric resonators with direct-patterned PZN–PZT thick films to show the ability of the direct-patterning of the PZT thick film on a silicon wafer for actuator and sensor application, especially for mass production.

Original languageEnglish
Pages (from-to)3845-3853
Number of pages9
JournalJournal of Materials Science
Volume50
Issue number11
DOIs
Publication statusPublished - 2015 Jun 1

Fingerprint

Polymethyl Methacrylate
Sols
Infiltration
Thick films
Lead
Fabrication
Sintering
Polarization
Photomasks
Silicon wafers
Ultraviolet radiation
Zinc
Resonators
Electric properties
Actuators
lead titanate zirconate
Temperature
Microstructure
Sensors

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Lee, Jin Hyung ; Lee, Jeong Hoon ; Kim, Sang Kyung ; Park, Hyung-Ho ; Kim, Tae Song. / Hybrid fabrication of piezoelectric thick films using a sol-infiltration and photosensitive direct-patterning technique. In: Journal of Materials Science. 2015 ; Vol. 50, No. 11. pp. 3845-3853.
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Hybrid fabrication of piezoelectric thick films using a sol-infiltration and photosensitive direct-patterning technique. / Lee, Jin Hyung; Lee, Jeong Hoon; Kim, Sang Kyung; Park, Hyung-Ho; Kim, Tae Song.

In: Journal of Materials Science, Vol. 50, No. 11, 01.06.2015, p. 3845-3853.

Research output: Contribution to journalArticle

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