Hybrid Thin-Film Encapsulation for All-Solid-State Thin-Film Batteries

Hyunseok Lee, Keun Yong Lim, Kwang Bum Kim, Jae Woong Yu, Won Kook Choi, Ji Won Choi

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


All-solid-state thin-film batteries have been actively investigated as a power source for various microdevices. However, insufficient research has been conducted on thin-film encapsulation, which is an essential element of these batteries as solid electrolytes and Li anodes are vulnerable to moisture in the atmosphere. In this study, a hybrid thin-film encapsulation structure of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene is suggested and investigated. The water-vapor transmission rate of hybrid thin-film encapsulation is estimated to be 4.9 × 10-3 g m-2·day-1, a value that is applicable to batteries as well as flexible solar cells, thin-film transistor liquid-crystal display, and E-papers. As a result of hybrid thin-film encapsulation, it is confirmed that the all-solid-state thin-film batteries are stable even after 100 charge/discharge cycles in the air atmosphere for 30 days and present a Coulombic efficiency of 99.8% even after 100 cycles in the air atmosphere. These results demonstrate that the thin-film encapsulation structure of hybrid SiOy/SiNxOy/a-SiNx:H/Parylene can be employed in thin-film batteries while retaining long-term stability.

Original languageEnglish
Pages (from-to)11504-11510
Number of pages7
JournalACS Applied Materials and Interfaces
Issue number10
Publication statusPublished - 2020 Mar 11

Bibliographical note

Funding Information:
This research was supported by the Korea Institute of Science and Technology Future Resource Program (2E30410). This work is supported by R&D program of Ministry of Trade, Industry, and Energy/Korea Institute of Energy Technology Evaluation and Planning (MOTIE/KETEP) (no. 20153030012720) and Ministry of Science and ICT/National Research Foundation (MSIT/NRF) (no. 2017M1A2A2048879).

Publisher Copyright:
Copyright © 2020 American Chemical Society.

All Science Journal Classification (ASJC) codes

  • Materials Science(all)


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