Hydrogen barrier performance of sputtered La2O3 films for InGaZnO thin-film transistor

Yujin Lee, Chong Hwon Lee, Taewook Nam, Sanghun Lee, Il Kwon Oh, Joon Young Yang, Dong Wook Choi, Choongkeun Yoo, Ho jin Kim, Woo Hee Kim, Hyungjun Kim

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Engineering & Materials Science

Chemical Compounds