Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture

Taekyong Lee, Eungman Lee, Seonghyeon Oh, Jae W. Hahn

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.

Original languageEnglish
Article number145502
JournalNanotechnology
Volume24
Issue number14
DOIs
Publication statusPublished - 2013 Apr 12

Fingerprint

Nanostructures
Scanning
Imaging techniques
Refractive index
Microscopes
Metals
Data storage equipment
Networks (circuits)
Substrates

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, Taekyong ; Lee, Eungman ; Oh, Seonghyeon ; Hahn, Jae W. / Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture. In: Nanotechnology. 2013 ; Vol. 24, No. 14.
@article{f67ce42948dd428e85ad42e0db0a2fdf,
title = "Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture",
abstract = "We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50{\%} smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.",
author = "Taekyong Lee and Eungman Lee and Seonghyeon Oh and Hahn, {Jae W.}",
year = "2013",
month = "4",
day = "12",
doi = "10.1088/0957-4484/24/14/145502",
language = "English",
volume = "24",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "14",

}

Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture. / Lee, Taekyong; Lee, Eungman; Oh, Seonghyeon; Hahn, Jae W.

In: Nanotechnology, Vol. 24, No. 14, 145502, 12.04.2013.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture

AU - Lee, Taekyong

AU - Lee, Eungman

AU - Oh, Seonghyeon

AU - Hahn, Jae W.

PY - 2013/4/12

Y1 - 2013/4/12

N2 - We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.

AB - We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.

UR - http://www.scopus.com/inward/record.url?scp=84875331848&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84875331848&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/24/14/145502

DO - 10.1088/0957-4484/24/14/145502

M3 - Article

AN - SCOPUS:84875331848

VL - 24

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 14

M1 - 145502

ER -