Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture

Taekyong Lee, Eungman Lee, Seonghyeon Oh, Jae W. Hahn

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.

Original languageEnglish
Article number145502
JournalNanotechnology
Volume24
Issue number14
DOIs
Publication statusPublished - 2013 Apr 12

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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