Abstract
We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.
Original language | English |
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Article number | 145502 |
Journal | Nanotechnology |
Volume | 24 |
Issue number | 14 |
DOIs | |
Publication status | Published - 2013 Apr 12 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering