Abstract
We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.
| Original language | English |
|---|---|
| Article number | 145502 |
| Journal | Nanotechnology |
| Volume | 24 |
| Issue number | 14 |
| DOIs | |
| Publication status | Published - 2013 Apr 12 |
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All Science Journal Classification (ASJC) codes
- Bioengineering
- Chemistry(all)
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
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Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture. / Lee, Taekyong; Lee, Eungman; Oh, Seonghyeon; Hahn, Jae W.
In: Nanotechnology, Vol. 24, No. 14, 145502, 12.04.2013.Research output: Contribution to journal › Article
TY - JOUR
T1 - Imaging heterogeneous nanostructures with a plasmonic resonant ridge aperture
AU - Lee, Taekyong
AU - Lee, Eungman
AU - Oh, Seonghyeon
AU - Hahn, Jae W.
PY - 2013/4/12
Y1 - 2013/4/12
N2 - We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.
AB - We introduce a plasmonic resonance ridge aperture capable of sensing changes in refractive index and absorption with nanoscale resolution. Using this aperture, we devised a plasmonic near-field scanning nanoscope (PNSN) to record images of heterogeneous nanostructures. Compared to a conventional near-field scanning optical microscope (NSOM) that measures light scattered by the sample, the PNSN directly measures the change in a beam reflected from the aperture to detect buried objects. Using the PNSN we recorded images of nanoscale rectangular groove arrays on a SiO2 substrate with patterns typical of a dynamic random access memory circuit. By comparing the experimental and calculated image of the nanostructure, we estimate the resolution of PNSN to be ∼20 nm, which is ∼50% smaller than the near-field spot generated by the aperture. Also, we theoretically analyzed the feasibility of the PNSN detecting an object underneath a metal film.
UR - http://www.scopus.com/inward/record.url?scp=84875331848&partnerID=8YFLogxK
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U2 - 10.1088/0957-4484/24/14/145502
DO - 10.1088/0957-4484/24/14/145502
M3 - Article
AN - SCOPUS:84875331848
VL - 24
JO - Nanotechnology
JF - Nanotechnology
SN - 0957-4484
IS - 14
M1 - 145502
ER -