Impact of in situ NH3 preannealing on sub-100 nm tungsten polymetal gate electrode during the sealing nitride formation

Kwan Yong Lim, Jung Ho Lee, Heung Jae Cho, Jae Geun Oh, Byung Seop Hong, Se Aug Jang, Yong Soo Kim, Hong Seon Yang, Hyun Chul Sohn

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