Impact of millisecond flash-assisted rapid thermal annealing on SiGe heterostructure channel pMOSFETs with a high-k/metal gate

Se Hoon Lee, Prashant Majhi, Domingo A. Ferrer, Pui Yee Hung, Jeff Huang, Jungwoo Oh, Wei Yip Loh, Barry Sassman, Byoung Gi Min, Hsing Huang Tseng, Rusty Harris, Gennadi Bersuker, Paul D. Kirsch, Raj Jammy, Sanjay K. Banerjee

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science