Impact of thin WSiX insertion in tungsten polymetal gate on gate oxide reliability and gate contact resistance

Min Gyu Sung, Kwan Yong Lim, Heung Jae Cho, Seung Ryong Lee, Se Aug Jang, Hong Seon Yang, Kwangok Kim, Noh Jung Kwak, Hyun Chul Sohn, Jin Woong Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

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Engineering & Materials Science