Improved air gap error using frequency estimation and peak filter in solid immersion lens-based plasmonic lithography system

Guk Jong Choi, Geon Lim, Taeseob Kim, Won Sup Lee, No Cheol Park, Yonug Pil Park, Hyunseok Yang, Kyoung Su Park

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science