Abstract
A study on the damp heat stability of transparent conducting ZnO thin film grown on a polyethylene terephthalate substrate (PET) is reported. By thermal annealing of the PET substrate at 100°C with Ar flow in a vacuum chamber prior to the sputtering growth of Ga-doped ZnO (GZO) thin film, significantly enhanced damp heat stability was achieved at 60°C with a 90% relative humidity. Electrical and structural characterizations of the GZO thin films were carried out and the effects of the pretreatment on the improved damp heat stability are discussed.
Original language | English |
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Pages (from-to) | 599-603 |
Number of pages | 5 |
Journal | Electronic Materials Letters |
Volume | 9 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2013 Sep |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials