Improved damp heat stability of Ga-Doped ZnO thin film by pretreatment of the polyethylene terephthalate substrate

B. B. Kim, S. G. Seo, Y. S. Lim, H. S. Choi, W. S. Seo, Hyung-Ho Park

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A study on the damp heat stability of transparent conducting ZnO thin film grown on a polyethylene terephthalate substrate (PET) is reported. By thermal annealing of the PET substrate at 100°C with Ar flow in a vacuum chamber prior to the sputtering growth of Ga-doped ZnO (GZO) thin film, significantly enhanced damp heat stability was achieved at 60°C with a 90% relative humidity. Electrical and structural characterizations of the GZO thin films were carried out and the effects of the pretreatment on the improved damp heat stability are discussed.

Original languageEnglish
Pages (from-to)599-603
Number of pages5
JournalElectronic Materials Letters
Volume9
Issue number5
DOIs
Publication statusPublished - 2013 Sep 1

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Polyethylene Terephthalates
Polyethylene terephthalates
Thin films
Substrates
Sputtering
Atmospheric humidity
Vacuum
Annealing
Hot Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Kim, B. B. ; Seo, S. G. ; Lim, Y. S. ; Choi, H. S. ; Seo, W. S. ; Park, Hyung-Ho. / Improved damp heat stability of Ga-Doped ZnO thin film by pretreatment of the polyethylene terephthalate substrate. In: Electronic Materials Letters. 2013 ; Vol. 9, No. 5. pp. 599-603.
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Improved damp heat stability of Ga-Doped ZnO thin film by pretreatment of the polyethylene terephthalate substrate. / Kim, B. B.; Seo, S. G.; Lim, Y. S.; Choi, H. S.; Seo, W. S.; Park, Hyung-Ho.

In: Electronic Materials Letters, Vol. 9, No. 5, 01.09.2013, p. 599-603.

Research output: Contribution to journalArticle

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