Abstract
A study on the damp heat stability of transparent conducting ZnO thin film grown on a polyethylene terephthalate substrate (PET) is reported. By thermal annealing of the PET substrate at 100°C with Ar flow in a vacuum chamber prior to the sputtering growth of Ga-doped ZnO (GZO) thin film, significantly enhanced damp heat stability was achieved at 60°C with a 90% relative humidity. Electrical and structural characterizations of the GZO thin films were carried out and the effects of the pretreatment on the improved damp heat stability are discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 599-603 |
| Number of pages | 5 |
| Journal | Electronic Materials Letters |
| Volume | 9 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2013 Sep |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
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Kim, B. B., Seo, S. G., Lim, Y. S., Choi, H. S., Seo, W. S., & Park, H. H. (2013). Improved damp heat stability of Ga-Doped ZnO thin film by pretreatment of the polyethylene terephthalate substrate. Electronic Materials Letters, 9(5), 599-603. https://doi.org/10.1007/s13391-013-2208-1