Improved damp heat stability of Ga-Doped ZnO thin film by pretreatment of the polyethylene terephthalate substrate

B. B. Kim, S. G. Seo, Y. S. Lim, H. S. Choi, W. S. Seo, Hyung-Ho Park

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A study on the damp heat stability of transparent conducting ZnO thin film grown on a polyethylene terephthalate substrate (PET) is reported. By thermal annealing of the PET substrate at 100°C with Ar flow in a vacuum chamber prior to the sputtering growth of Ga-doped ZnO (GZO) thin film, significantly enhanced damp heat stability was achieved at 60°C with a 90% relative humidity. Electrical and structural characterizations of the GZO thin films were carried out and the effects of the pretreatment on the improved damp heat stability are discussed.

Original languageEnglish
Pages (from-to)599-603
Number of pages5
JournalElectronic Materials Letters
Issue number5
Publication statusPublished - 2013 Sep 1


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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