Improved nanogap servo system using an error-based disturbance observer for high-speed in solid immersion lens-based plasmonic lithography

Geon Lim, Taeseob Kim, Won Sup Lee, Guk Jong Choi, Kyoung Su Park, Young Pil Park, Hyunseok Yang, No Cheol Park

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We proposed an advanced nanogap servo system using the error-based disturbance observer (EDOB) system. To achieve the feedback control over the nanogap based on the gap error signal (GES) in the near-field region, a precise gap-curve was obtained experimentally between a solid immersion lens and a photoresist-coated wafer using a piezo nanoposition actuator. With an accurate nanogap servo system, the EDOB was designed with a low-pass filter of 2.0 kHz bandwidth. Due to the powerful properties of the EDOB, which include stable robustness and disturbance rejection, a high-speed nanogap servo was achieved with up to 400 and 300 mm/s at the desired gaps of 20 and 15 nm, respectively. The disturbance rejection performance was evaluated from the GES, and the maximum deviation value was reduced by approximately 40% over that of the servo system without the EDOB.

Original languageEnglish
Article number09LG02
JournalJapanese journal of applied physics
Volume52
Issue number9 PART3
DOIs
Publication statusPublished - 2013 Sep 1

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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