Improved thermal stability of Ni silicide on Si (100) through reactive deposition of Ni

Gi Bum Kim, Do Joon Yoo, Hong Koo Baik, Jae Min Myoung, Sung Man Lee, Sang Ho Oh, Chan Gyung Park

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

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Engineering & Materials Science

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