Improvement in current density of nano- and micro-structured Si solar cells by cost-effective elastomeric stamp process

Kiseok Jeon, Hongsub Jee, Sangwoo Lim, Min Joon Park, Chaehwan Jeong

Research output: Contribution to journalArticle


Effective incident light should be controlled for improving the current density of solar cells by employing nano- and micro-structures on silicon surface. The elastomeric stamp process, which is more cost effective and simpler than conventional photolithography, was proposed for the fabrication of nano- and micro-structures. Polydimethylsiloxane (PDMS) was poured on a mother pattern with a diameter of 6 μm and a spacing of 2 μm; then, curing was performed to create a PDMS mold. The regular micropattern was stamped on a low-viscosity resin-coated silicon surface, followed by the simple reactive ion etching process. Nano-structures were formed using the Ag-based electroless etching process. As etching time was increased to 6 min, reflectance decreased to 4.53% and current density improved from 22.35 to 34.72 mA/cm2.

Original languageEnglish
Article number035203
JournalAIP Advances
Issue number3
Publication statusPublished - 2018 Mar 1


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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