In this study, inorganic multilayer thin-film encapsulation is adopted for the first time to protect an organic layer from moisture and oxygen, Inorganic multilayer thin-film encapsulation is deposited onto poly(ethylene terephthalate) (PET) using an electron beam and sputtering. The SiON/SiO 2 and parylene layer show the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from a level of 0.57gm-2 day-1 (bare substrate) to 1 × 10-5 gm-2 day-1 after the application of a SiON and SiO2 layer. These results indicate that PET/parylene/SiO 2/SiON barrier coatings have high potential for flexible organic light-emitting diode (OLED) applications.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)