Improvement of permeation of solvent-free multilayer encapsulation of thin films on polyethylene terephthalate

Jin Woo Han, Hee Jin Kang, Jong Yeon Kim, Gwi Yeol Kim, Dae Shik Seo

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this study, inorganic multilayer thin-film encapsulation is adopted for the first time to protect an organic layer from moisture and oxygen, Inorganic multilayer thin-film encapsulation is deposited onto poly(ethylene terephthalate) (PET) using an electron beam and sputtering. The SiON/SiO 2 and parylene layer show the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from a level of 0.57gm-2 day-1 (bare substrate) to 1 × 10-5 gm-2 day-1 after the application of a SiON and SiO2 layer. These results indicate that PET/parylene/SiO 2/SiON barrier coatings have high potential for flexible organic light-emitting diode (OLED) applications.

Original languageEnglish
Pages (from-to)9203-9204
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number12
DOIs
Publication statusPublished - 2006 Dec 15

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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