Improvement of permeation of solvent-free multilayer encapsulation of thin films on polyethylene terephthalate

Jin Woo Han, Hee Jin Kang, Jong Yeon Kim, Gwi Yeol Kim, Dae Shik Seo

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

In this study, inorganic multilayer thin-film encapsulation is adopted for the first time to protect an organic layer from moisture and oxygen, Inorganic multilayer thin-film encapsulation is deposited onto poly(ethylene terephthalate) (PET) using an electron beam and sputtering. The SiON/SiO 2 and parylene layer show the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from a level of 0.57gm-2 day-1 (bare substrate) to 1 × 10-5 gm-2 day-1 after the application of a SiON and SiO2 layer. These results indicate that PET/parylene/SiO 2/SiON barrier coatings have high potential for flexible organic light-emitting diode (OLED) applications.

Original languageEnglish
Pages (from-to)9203-9204
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number12
DOIs
Publication statusPublished - 2006 Dec 15

Fingerprint

Multilayer films
polyethylene terephthalate
Encapsulation
Permeation
Polyethylene terephthalates
Multilayers
Thin films
Organic light emitting diodes (OLED)
thin films
Water vapor
Sputtering
Electron beams
Moisture
moisture
Coatings
Oxygen
water vapor
Substrates
light emitting diodes
sputtering

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

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abstract = "In this study, inorganic multilayer thin-film encapsulation is adopted for the first time to protect an organic layer from moisture and oxygen, Inorganic multilayer thin-film encapsulation is deposited onto poly(ethylene terephthalate) (PET) using an electron beam and sputtering. The SiON/SiO 2 and parylene layer show the most suitable properties. Under these conditions, the water vapor transmission rate (WVTR) for PET can be reduced from a level of 0.57gm-2 day-1 (bare substrate) to 1 × 10-5 gm-2 day-1 after the application of a SiON and SiO2 layer. These results indicate that PET/parylene/SiO 2/SiON barrier coatings have high potential for flexible organic light-emitting diode (OLED) applications.",
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Improvement of permeation of solvent-free multilayer encapsulation of thin films on polyethylene terephthalate. / Han, Jin Woo; Kang, Hee Jin; Kim, Jong Yeon; Kim, Gwi Yeol; Seo, Dae Shik.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 45, No. 12, 15.12.2006, p. 9203-9204.

Research output: Contribution to journalArticle

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AU - Seo, Dae Shik

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