Improvement of plasma uniformity using ZnO-coated dielectric barrier discharge in open air

Jai Hyuk Choi, Tae Ii Lee, Inho Han, Byeong Yun Oh, Min Chang Jeong, Jae Min Myoung, Hong Koo Baik, Kie Moon Song, Yong Sik Lim

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The discharge behavior in atmospheric pressure dielectric barrier discharge using ZnO-coated dielectric layer is examined. ZnO thin film on alumina using rf magnetron sputter causes about a factor of a million higher surface conductivity than bare alumina surface. Experimental result shows that discharge uniformity is improved definitely in the case of ZnO-coated dielectric barrier discharge. Increase of surface conductivity stimulates charges to spread over the dielectric surface widely. These charge spreading enhances the uniformity and the stability of atmospheric pressure discharge in open air by initiation of consecutive streamers.

Original languageEnglish
Article number081501
JournalApplied Physics Letters
Issue number8
Publication statusPublished - 2006 Aug 31


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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