Improvement of thermal stability of Ni-germanide with co-sputtering of nickel and palladium for high performance Ge CMOSFET

Hong Sik Shin, Se Kyung Oh, Min Ho Kang, Jae Hyung Jang, Jungwoo Oh, Prashant Majhi, Raj Jammy, Yi Sun Chung, Sang Soo Kim, Da Soon Lee, Song Jae Lee, Hi Deok Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science