In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography

Seung Ah Lee; Su Eun Chung; Sunghoon Kwon

In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography

Seung Ah Lee, Su Eun Chung, Sunghoon Kwon

Department of Electrical and Electronic Engineering

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

We propose a simple fabrication method of multilayered polymeric structures by photopolymerizing liquid prepolymer in a layer-by-layer fashion. By performing optofluidic maskless lithography (OFML) in a height-tunable microfluidic channel, both the shape and the thickness of each layer can be controlled, generating threedimensional structures without complex high numerical-aperture photolithography processes.

Original language	English
Pages	1651-1653
Number of pages	3
Publication status	Published - 2008
Event	12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 - San Diego, CA, United States Duration: 2008 Oct 12 → 2008 Oct 16

Other

Other	12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008
Country/Territory	United States
City	San Diego, CA
Period	08/10/12 → 08/10/16

All Science Journal Classification (ASJC) codes

Chemical Engineering (miscellaneous)
Bioengineering

Cite this

@conference{52fe3f5552cf4cdcb1debb4e638e0ca0,

title = "In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography",

abstract = "We propose a simple fabrication method of multilayered polymeric structures by photopolymerizing liquid prepolymer in a layer-by-layer fashion. By performing optofluidic maskless lithography (OFML) in a height-tunable microfluidic channel, both the shape and the thickness of each layer can be controlled, generating threedimensional structures without complex high numerical-aperture photolithography processes.",

author = "Lee, {Seung Ah} and Chung, {Su Eun} and Sunghoon Kwon",

year = "2008",

language = "English",

pages = "1651--1653",

note = "12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008 ; Conference date: 12-10-2008 Through 16-10-2008",

}

In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography. / Lee, Seung Ah; Chung, Su Eun; Kwon, Sunghoon.

2008. 1651-1653 Paper presented at 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008, San Diego, CA, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography

AU - Lee, Seung Ah

AU - Chung, Su Eun

AU - Kwon, Sunghoon

PY - 2008

Y1 - 2008

N2 - We propose a simple fabrication method of multilayered polymeric structures by photopolymerizing liquid prepolymer in a layer-by-layer fashion. By performing optofluidic maskless lithography (OFML) in a height-tunable microfluidic channel, both the shape and the thickness of each layer can be controlled, generating threedimensional structures without complex high numerical-aperture photolithography processes.

AB - We propose a simple fabrication method of multilayered polymeric structures by photopolymerizing liquid prepolymer in a layer-by-layer fashion. By performing optofluidic maskless lithography (OFML) in a height-tunable microfluidic channel, both the shape and the thickness of each layer can be controlled, generating threedimensional structures without complex high numerical-aperture photolithography processes.

UR - http://www.scopus.com/inward/record.url?scp=84902438929&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84902438929&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84902438929

SP - 1651

EP - 1653

T2 - 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2008

Y2 - 12 October 2008 through 16 October 2008

ER -

In-situ fabrication of threedimensional polymeric microstructures using soft membrane deformation and optofluidic maskless lithography

Abstract

Other

All Science Journal Classification (ASJC) codes

Other files and links

Fingerprint

Cite this