In-situ frequency tuning of electrostatically actuated vibrating nano structures using focused ion beam

Jiyoung Chang, Jongbaeg Kim, Byung Kwon Min, Sang Jo Lee, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Schemes for in-situ resonant frequency tuning of nano scale vibrating structures using Focused Ion Beam (FIB) sputtering and FIB-Chemical Vapor Deposition (CVD) are presented. This approach introduces precisely controlled permanent increase or decrease of resonant frequencies on processed nano structures, enabling the frequency adjustment when the desired resonant frequency is higher or lower than the actual frequency of the fabricated resonators. The vibration is induced by electrostatic force between resonator and stator using 0-10V AC input and all the processes including fabrication of nanostructure, electrostatic actuation, vibration observation and frequency tuning in either higher or lower direction were successfully conducted in single FIB chamber. The range of the frequency tuned from 600kHz initial resonant frequency is +6kHz with -1.9μm and -65kHz with +1.1μm length change of the nano-resonator respectively. Structural FEM analysis result is compared with the experimental result.

Original languageEnglish
Title of host publicationProceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Microelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Print)0791837904, 9780791837900
DOIs
Publication statusPublished - 2006
Event2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL, United States
Duration: 2006 Nov 52006 Nov 10

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
ISSN (Print)1096-665X

Other

Other2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
CountryUnited States
CityChicago, IL
Period06/11/506/11/10

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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