Incorporation of one-step-synthesized Pt nanoparticles (NPs) enhanced the electrical properties of direct-patternable fluorine (1.06 atom%)-doped SnO2 thin films without significant degeneration of the structural or optical properties. A fluorine-doped SnO2 thin film with 0.5 atom% Pt NPs showed slightly lower electrical resistivity than the pristine fluorine-doped SnO2 thin film due to the larger positive contribution of the reductioncatalytic effect of Pt NPs than the negative contribution from halide bond formation between fluorine ions and Pt NPs. However, above 0.5 atom% Pt NPs incorporation, the electrical resistivity of the fluorine-doped SnO2 thin film increased because the effects caused by halide bond formation are greater than those of the reduction-catalytic effect. Direct-patterning of fluorinedoped SnO2 thin films, after spin coating, was successfully performed with a line width of 60 μm.
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