Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements

Monika Kosowska; Sandra Pawłowska; Kamatchi J. Sankaran; Daria Majchrowicz; Ken Haenen; Kishan Dholakia; Małgorzata Szczerska

doi:10.1016/j.diamond.2020.108221

Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements

Monika Kosowska, Sandra Pawłowska, Kamatchi J. Sankaran, Daria Majchrowicz, Ken Haenen, Kishan Dholakia, Małgorzata Szczerska

Department of Physics

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

This paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal micro-Raman spectroscopy, and electron energy loss spectroscopy (EELS). The homogeneous and continuous surface morphology of the films is observed through SEM. In the micro-Raman and electron energy loss spectroscopy studies, it is evident that there is a formation of sp²-bonded carbon phases due to the increase in the concentration of nitrogen. This investigation gives a strong basis for utilizing these diamond films as reflective layers in fiber-optic devices. The interferometric measurement setup is constructed as a Fabry-Pérot interferometer. The nitrogen incorporated films are proved to be useful as mirrors as they achieve a measurement signal with high contrast. The achieved visibility values for the investigated samples are higher than 94% in the range of 40–100 μm.

Original language	English
Article number	108221
Journal	Diamond and Related Materials
Volume	111
DOIs	https://doi.org/10.1016/j.diamond.2020.108221
Publication status	Published - 2021 Jan

Bibliographical note

Funding Information:
This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610 , Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001 , and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gdańsk University of Technology . Financial support of these studies from Gdańsk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N . KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1 .

Funding Information:
This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610, Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001, and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gda?sk University of Technology. Financial support of these studies from Gda?sk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N. KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1.

Publisher Copyright:
© 2020 Elsevier B.V.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

Access to Document

10.1016/j.diamond.2020.108221

Cite this

@article{1829e3f2b3a34a7b89c6c293d86b5393,

title = "Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements",

abstract = "This paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal micro-Raman spectroscopy, and electron energy loss spectroscopy (EELS). The homogeneous and continuous surface morphology of the films is observed through SEM. In the micro-Raman and electron energy loss spectroscopy studies, it is evident that there is a formation of sp2-bonded carbon phases due to the increase in the concentration of nitrogen. This investigation gives a strong basis for utilizing these diamond films as reflective layers in fiber-optic devices. The interferometric measurement setup is constructed as a Fabry-P{\'e}rot interferometer. The nitrogen incorporated films are proved to be useful as mirrors as they achieve a measurement signal with high contrast. The achieved visibility values for the investigated samples are higher than 94% in the range of 40–100 μm.",

author = "Monika Kosowska and Sandra Paw{\l}owska and Sankaran, {Kamatchi J.} and Daria Majchrowicz and Ken Haenen and Kishan Dholakia and Ma{\l}gorzata Szczerska",

note = "Funding Information: This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610 , Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001 , and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gda{\'n}sk University of Technology . Financial support of these studies from Gda{\'n}sk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N . KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1 . Funding Information: This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610, Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001, and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gda?sk University of Technology. Financial support of these studies from Gda?sk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N. KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1. Publisher Copyright: {\textcopyright} 2020 Elsevier B.V.",

year = "2021",

month = jan,

doi = "10.1016/j.diamond.2020.108221",

language = "English",

volume = "111",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements

AU - Kosowska, Monika

AU - Pawłowska, Sandra

AU - Sankaran, Kamatchi J.

AU - Majchrowicz, Daria

AU - Haenen, Ken

AU - Dholakia, Kishan

AU - Szczerska, Małgorzata

N1 - Funding Information: This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610 , Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001 , and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gdańsk University of Technology . Financial support of these studies from Gdańsk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N . KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1 . Funding Information: This research was funded by Polish National Science Centre (NCN) grant number 2017/25/N/ST7/01610, Polish National Agency for Academic Exchange under Iwanowska Programme PPN/IWA/2018/00026/U/00001 and Iwanowska Programme PPN/IWA/2018/1/00058/U/0001, and the DS funds of the Faculty of Electronics, Telecommunications, and Informatics of the Gda?sk University of Technology. Financial support of these studies from Gda?sk University of Technology by the 11/2020/IDUB/I.3/CC grant under the COMBATING CORONAVIRUS - EIRU program is gratefully acknowledged. KH acknowledges the Research Foundation Flanders (FWO) via Research Project G0D4920N. KD thanks the UK Engineering and Physical Sciences Research Council through grant EP/P030017/1. Publisher Copyright: © 2020 Elsevier B.V.

PY - 2021/1

Y1 - 2021/1

N2 - This paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal micro-Raman spectroscopy, and electron energy loss spectroscopy (EELS). The homogeneous and continuous surface morphology of the films is observed through SEM. In the micro-Raman and electron energy loss spectroscopy studies, it is evident that there is a formation of sp2-bonded carbon phases due to the increase in the concentration of nitrogen. This investigation gives a strong basis for utilizing these diamond films as reflective layers in fiber-optic devices. The interferometric measurement setup is constructed as a Fabry-Pérot interferometer. The nitrogen incorporated films are proved to be useful as mirrors as they achieve a measurement signal with high contrast. The achieved visibility values for the investigated samples are higher than 94% in the range of 40–100 μm.

AB - This paper investigates the impact of nitrogen incorporation in diamond films for the construction of an interferometric sensor to measure displacement. Diamond films with different nitrogen levels (0–5%) were deposited on silicon substrates by microwave plasma enhanced chemical vapor deposition. The structural characteristics of these samples are characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), confocal micro-Raman spectroscopy, and electron energy loss spectroscopy (EELS). The homogeneous and continuous surface morphology of the films is observed through SEM. In the micro-Raman and electron energy loss spectroscopy studies, it is evident that there is a formation of sp2-bonded carbon phases due to the increase in the concentration of nitrogen. This investigation gives a strong basis for utilizing these diamond films as reflective layers in fiber-optic devices. The interferometric measurement setup is constructed as a Fabry-Pérot interferometer. The nitrogen incorporated films are proved to be useful as mirrors as they achieve a measurement signal with high contrast. The achieved visibility values for the investigated samples are higher than 94% in the range of 40–100 μm.

UR - http://www.scopus.com/inward/record.url?scp=85097712230&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85097712230&partnerID=8YFLogxK

U2 - 10.1016/j.diamond.2020.108221

DO - 10.1016/j.diamond.2020.108221

M3 - Article

AN - SCOPUS:85097712230

SN - 0925-9635

VL - 111

JO - Diamond and Related Materials

JF - Diamond and Related Materials

M1 - 108221

ER -

Incorporation of nitrogen in diamond films – A new way of tuning parameters for optical passive elements

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this