Individual Pd nanowire hydrogen sensors fabricated by electron-beam lithography

Kye Jin Jeon, Jun Min Lee, Eunsongyi Lee, Wooyoung Lee

Research output: Contribution to journalArticle

87 Citations (Scopus)

Abstract

We report on the hydrogen gas (H 2 ) sensing performance of lithographically patterned Pd nanowires as a function of the nanowire thickness and H 2 concentration. A combination of electron-beam lithography and a lift-off process has been utilized to fabricate four-terminal devices based on individual Pd nanowires with width w = 300 nm, length l = 10 νm, and thickness t = 20-400 nm from continuous Pd films. The variation of the resistance and sensitivity at 20 000 ppm H 2 of Pd nanowires was found to be much lager than at 10 000 ppm H 2 , which can be explained by an α-β phase transition occurring at 20 000 ppm H 2 . This is confirmed by the observation of hysteresis behavior in the resistance versus H 2 concentration for Pd thin films. The response time was found to decrease with decreasing thickness regardless of H 2 concentration due to a higher surface-to-volume ratio and a higher clamping effect. A single Pd nanowire with t = 100 nm was found to successfully detect H 2 at a detection limit of 20 ppm. Our results suggest that lithographically patterned Pd nanowires can be used as hydrogen gas sensors to quantitatively detect H 2 over a wide range of concentrations.

Original languageEnglish
Article number135502
JournalNanotechnology
Volume20
Issue number13
DOIs
Publication statusPublished - 2009 May 18

Fingerprint

Electron beam lithography
Nanowires
Hydrogen
Sensors
Beer
Chemical sensors
Hysteresis
Gases
Phase transitions
Thin films

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Jeon, Kye Jin ; Lee, Jun Min ; Lee, Eunsongyi ; Lee, Wooyoung. / Individual Pd nanowire hydrogen sensors fabricated by electron-beam lithography. In: Nanotechnology. 2009 ; Vol. 20, No. 13.
@article{56dfa030e7d1432f87f60224cb63f779,
title = "Individual Pd nanowire hydrogen sensors fabricated by electron-beam lithography",
abstract = "We report on the hydrogen gas (H 2 ) sensing performance of lithographically patterned Pd nanowires as a function of the nanowire thickness and H 2 concentration. A combination of electron-beam lithography and a lift-off process has been utilized to fabricate four-terminal devices based on individual Pd nanowires with width w = 300 nm, length l = 10 νm, and thickness t = 20-400 nm from continuous Pd films. The variation of the resistance and sensitivity at 20 000 ppm H 2 of Pd nanowires was found to be much lager than at 10 000 ppm H 2 , which can be explained by an α-β phase transition occurring at 20 000 ppm H 2 . This is confirmed by the observation of hysteresis behavior in the resistance versus H 2 concentration for Pd thin films. The response time was found to decrease with decreasing thickness regardless of H 2 concentration due to a higher surface-to-volume ratio and a higher clamping effect. A single Pd nanowire with t = 100 nm was found to successfully detect H 2 at a detection limit of 20 ppm. Our results suggest that lithographically patterned Pd nanowires can be used as hydrogen gas sensors to quantitatively detect H 2 over a wide range of concentrations.",
author = "Jeon, {Kye Jin} and Lee, {Jun Min} and Eunsongyi Lee and Wooyoung Lee",
year = "2009",
month = "5",
day = "18",
doi = "10.1088/0957-4484/20/13/135502",
language = "English",
volume = "20",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "13",

}

Individual Pd nanowire hydrogen sensors fabricated by electron-beam lithography. / Jeon, Kye Jin; Lee, Jun Min; Lee, Eunsongyi; Lee, Wooyoung.

In: Nanotechnology, Vol. 20, No. 13, 135502, 18.05.2009.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Individual Pd nanowire hydrogen sensors fabricated by electron-beam lithography

AU - Jeon, Kye Jin

AU - Lee, Jun Min

AU - Lee, Eunsongyi

AU - Lee, Wooyoung

PY - 2009/5/18

Y1 - 2009/5/18

N2 - We report on the hydrogen gas (H 2 ) sensing performance of lithographically patterned Pd nanowires as a function of the nanowire thickness and H 2 concentration. A combination of electron-beam lithography and a lift-off process has been utilized to fabricate four-terminal devices based on individual Pd nanowires with width w = 300 nm, length l = 10 νm, and thickness t = 20-400 nm from continuous Pd films. The variation of the resistance and sensitivity at 20 000 ppm H 2 of Pd nanowires was found to be much lager than at 10 000 ppm H 2 , which can be explained by an α-β phase transition occurring at 20 000 ppm H 2 . This is confirmed by the observation of hysteresis behavior in the resistance versus H 2 concentration for Pd thin films. The response time was found to decrease with decreasing thickness regardless of H 2 concentration due to a higher surface-to-volume ratio and a higher clamping effect. A single Pd nanowire with t = 100 nm was found to successfully detect H 2 at a detection limit of 20 ppm. Our results suggest that lithographically patterned Pd nanowires can be used as hydrogen gas sensors to quantitatively detect H 2 over a wide range of concentrations.

AB - We report on the hydrogen gas (H 2 ) sensing performance of lithographically patterned Pd nanowires as a function of the nanowire thickness and H 2 concentration. A combination of electron-beam lithography and a lift-off process has been utilized to fabricate four-terminal devices based on individual Pd nanowires with width w = 300 nm, length l = 10 νm, and thickness t = 20-400 nm from continuous Pd films. The variation of the resistance and sensitivity at 20 000 ppm H 2 of Pd nanowires was found to be much lager than at 10 000 ppm H 2 , which can be explained by an α-β phase transition occurring at 20 000 ppm H 2 . This is confirmed by the observation of hysteresis behavior in the resistance versus H 2 concentration for Pd thin films. The response time was found to decrease with decreasing thickness regardless of H 2 concentration due to a higher surface-to-volume ratio and a higher clamping effect. A single Pd nanowire with t = 100 nm was found to successfully detect H 2 at a detection limit of 20 ppm. Our results suggest that lithographically patterned Pd nanowires can be used as hydrogen gas sensors to quantitatively detect H 2 over a wide range of concentrations.

UR - http://www.scopus.com/inward/record.url?scp=65549154340&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65549154340&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/20/13/135502

DO - 10.1088/0957-4484/20/13/135502

M3 - Article

C2 - 19420501

AN - SCOPUS:65549154340

VL - 20

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 13

M1 - 135502

ER -