Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene

Junbeom Park; Ramesh Ghosh; Minho S. Song; Yunjae Hwang; Youngbin Tchoe; Rajendra Kumar Saroj; Asad Ali; Puspendu Guha; Bosung Kim; Sang Woo Kim; Miyoung Kim; Gyu Chul Yi

doi:10.1038/s41427-022-00386-4

Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene

Junbeom Park, Ramesh Ghosh, Minho S. Song, Yunjae Hwang, Youngbin Tchoe, Rajendra Kumar Saroj, Asad Ali, Puspendu Guha, Bosung Kim, Sang Woo Kim, Miyoung Kim, Gyu Chul Yi

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 × 3, 5 × 5, and 250 × 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems.

Original language	English
Article number	40
Journal	NPG Asia Materials
Volume	14
Issue number	1
DOIs	https://doi.org/10.1038/s41427-022-00386-4
Publication status	Published - 2022 Dec

Bibliographical note

Funding Information:
We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)).

Funding Information:
We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)).

Publisher Copyright:
© 2022, The Author(s).

All Science Journal Classification (ASJC) codes

Modelling and Simulation
Materials Science(all)
Condensed Matter Physics

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10.1038/s41427-022-00386-4

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@article{ba0fa9bf749c45a3897e5d753d0409b0,

title = "Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene",

abstract = "We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 × 3, 5 × 5, and 250 × 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems.",

author = "Junbeom Park and Ramesh Ghosh and Song, {Minho S.} and Yunjae Hwang and Youngbin Tchoe and Saroj, {Rajendra Kumar} and Asad Ali and Puspendu Guha and Bosung Kim and Kim, {Sang Woo} and Miyoung Kim and Yi, {Gyu Chul}",

note = "Funding Information: We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)). Funding Information: We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)). Publisher Copyright: {\textcopyright} 2022, The Author(s).",

year = "2022",

month = dec,

doi = "10.1038/s41427-022-00386-4",

language = "English",

volume = "14",

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T1 - Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene

AU - Park, Junbeom

AU - Ghosh, Ramesh

AU - Song, Minho S.

AU - Hwang, Yunjae

AU - Tchoe, Youngbin

AU - Saroj, Rajendra Kumar

AU - Ali, Asad

AU - Guha, Puspendu

AU - Kim, Bosung

AU - Kim, Sang Woo

AU - Kim, Miyoung

AU - Yi, Gyu Chul

N1 - Funding Information: We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)). Funding Information: We acknowledge the Brain Korea 21-Plus Program and Institute of Applied Physics, Seoul National University, for financial support to carry out part of this work. We further acknowledge Science Research Center (SRC) for Navel Epitaxial Quantum Architectures (NRF-2021R1A5A1032996). This work was also supported by the Samsung Research Funding Center of Samsung Electronics (SRFC-TA1803-02(0417-20180116)). Publisher Copyright: © 2022, The Author(s).

PY - 2022/12

Y1 - 2022/12

N2 - We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 × 3, 5 × 5, and 250 × 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems.

AB - We report the fabrication of individually addressable, high-density, vertical zinc oxide (ZnO) nanotube pressure sensor arrays. High-sensitivity and flexible piezoelectric sensors were fabricated using dimension- and position-controlled, vertical, and free-standing ZnO nanotubes on a graphene substrate. Significant pressure/force responses were achieved from small devices composed of only single, 3 × 3, 5 × 5, and 250 × 250 ZnO nanotube arrays on graphene. An individually addressable pixel matrix was fabricated by arranging the top and bottom electrodes of the sensors in a crossbar configuration. We investigated the uniformity and robustness of pressure/force spatial mapping by considering the pixel size, the number of ZnO nanotubes in each pixel, and the lateral dimensions of individual ZnO nanotubes. A spatial resolution as high as 1058 dpi was achieved for a Schottky diode-based force/pressure sensor composed of ZnO nanotubes on a flexible substrate. Additionally, we confirmed the excellent flexibility and electrical robustness of the free-standing sensor arrays for high-resolution tactile imaging. We believe that this work opens important opportunities for 1D piezoelectric pressure/force sensor arrays with enormous applications in human-electronics interfaces, smart skin, and micro- and nanoelectromechanical systems.

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Individually addressable and flexible pressure sensor matrixes with ZnO nanotube arrays on graphene

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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