Influence of annealing condition on the properties of sputtered hafnium oxide

Seok Woo Nam, Jung Ho Yoo, Suheun Nam, Hyo Jick Choi, Dongwon Lee, Dae Hong Ko, Joo Ho Moon, Ja Hum Ku, Siyoung Choi

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54 Citations (Scopus)

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Engineering & Materials Science

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